Abstract
In this chapter we review the fundamental techniques and processes underlying the fabrication of devices on the micron scale (referred to as “microfabrication”). Principles laid down in the 1950s now form the basis of the semiconductor manufacturing industry; these principles are easily adaptable to the production of devices for biotechnological processing and analysis.
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Acknowledgments
The author would like to thank Ken Danti, David Heredia, and Tracy Peterson for advice and editing. He would also like to acknowledge Sandia National Laboratories, a miltiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the United States Department of Energy's National Nuclear Security Administration under contract DE-AC04-94AL85000.
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Chinn, D. (2010). Microfabrication Techniques for Biologists: A Primer on Building Micromachines. In: Hughes, M., Hoettges, K. (eds) Microengineering in Biotechnology. Methods in Molecular Biology, vol 583. Humana Press, Totowa, NJ. https://doi.org/10.1007/978-1-60327-106-6_1
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DOI: https://doi.org/10.1007/978-1-60327-106-6_1
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Publisher Name: Humana Press, Totowa, NJ
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