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Fabrication of Glass Microfluidic Devices

  • Christopher T. CulbertsonEmail author
  • Jay Sibbitts
  • Kathleen Sellens
  • Shu Jia
Protocol
  • 619 Downloads
Part of the Methods in Molecular Biology book series (MIMB, volume 1906)

Abstract

This chapter provides step-by-step procedures for the fabrication of glass-based microfluidic devices. These procedures include device design, photomask generation, photolithography, channel etching, and high-temperature bonding.

Key words

Microfluidics Glass bonding Etching Photolithography Channel manifold 

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Copyright information

© Springer Science+Business Media, LLC, part of Springer Nature 2019

Authors and Affiliations

  • Christopher T. Culbertson
    • 1
    Email author
  • Jay Sibbitts
    • 1
  • Kathleen Sellens
    • 1
  • Shu Jia
    • 1
  1. 1.Department of ChemistryKansas State UniversityManhattanUSA

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