Evaluation of microfracture toughness and microcracking with notch tip radius of Si film structure for microactuator in hard disk drives S.-H. LeeJ. S. KimD. Kwon Pages: 91 - 98
A new process to fabricate the electromagnetic stepping micromotor using LIGA process and surface sacrificial layer technology F. YiL. PengY. Han Pages: 103 - 106
Active material micro-actuator arrays fabricated with SU-8 resin B. J. PokinesJ. TaniD. J. Inman Pages: 117 - 119
Backpropagation approximation approach based generation of macromodels for static and dynamic simulations F. E. H. TayA. OngkodjojoY. C. Liang Pages: 120 - 136
