International Conference on High Aspect Ratio Microstructure Technology HARMST ‘97 Peter Bley Editorial Pages: 103 - 103
Structural changes in PMMA under hard X-ray irradiation A. C. HenryR. L. McCarleyD. S. Poche Technical papers Pages: 104 - 109
A new method for mass fabrication of metallic microstructures A. ThiesV. PiotterO. F. Hagena Pages: 110 - 112
Comparative study of hot embossed micro structures fabricated by laboratory and commercial environments L. LinY.-T. ChengC.-J. Chiu Pages: 113 - 116
Technology for movable microstructures - Transfer of laboratory processes to industrial production O. RoettingM. HeckeleW. Bacher Pages: 120 - 121
Hot embossing - The molding technique for plastic microstructures M. HeckeleW. BacherK. D. Müller Pages: 122 - 124
Slip casting of ceramic microcomponents W. BauerH.-J. Ritzhaupt-KleisslJ. H. Hausselt Pages: 125 - 127
Multi-functional valve components fabricated by combination of LIGA processes and high precision mechanical engineering A. RuzzuJ. FahrenbergT. Schaller Pages: 128 - 131
LIGA-Technology for the fabrication of positioned planar structures H. SchiftJ. Söchtig Pages: 132 - 134
High aspect ratio micromachining by synchrotron radiation direct photo-etching T. KatohY. Zhang Pages: 135 - 138
Angular rate sensor and accelerometer combined on the same micromachined CMOS chip D. R. SparksX. HuangJ. D. Johnson Pages: 139 - 142
Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist H. LorenzM. DespontP. Renaud Pages: 143 - 146
Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components L. DellmannS. RothN. F. de Rooij Pages: 147 - 150
Heat exchange in short microtubes and micro heat exchangers with low hydraulic losses D. A. RachkovskijE. M. KussulS. A. Talayev Pages: 151 - 158
