Volume 4, Issue 3

Search all Nanomanufacturing and Metrology articles

September 2021

Tip- and laser-based 3D nanofabrication in extended macroscopic working areas

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9 articles in this issue

Foreword to the Special Issue on “Tip- and Laser-Based 3D Nanofabrication in Extended Macroscopic Working Areas”
Eberhard Manske
René Theska
Ingo Ortlepp
Foreword Open access 07 September 2021 Pages: 131 - 131
Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas
Ingo Ortlepp
Thomas Fröhlich
Eberhard Manske
Original Article Open access 10 August 2021 Pages: 132 - 148
Two-Photon Direct Laser Writing Beyond the Diffraction Limit Using the Nanopositioning and Nanomeasuring Machine
Laura Mohr-Weidenfeller
Annika-Verena Häcker
Eberhard Manske
Original Article Open access 05 April 2021 Pages: 149 - 155
Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes
Ralf Schienbein
Florian Fern
Eberhard Manske
Original Article Open access 20 April 2021 Pages: 156 - 164
Lau Effect Using LED Array for Lithography
Xinrui Cao
Patrick Feßer
Stefan Sinzinger
Original Article Open access 04 June 2021 Pages: 165 - 174
Development and Implementation of a Rotating Nanoimprint Lithography Tool for Orthogonal Imprinting on Edges of Curved Surfaces
Shraddha Supreeti
Ralf Schienbein
Stefan Sinzinger
Original Article Open access 18 August 2021 Pages: 175 - 180
Experimental Setup for the Investigation of Reproducibility of Novel Tool Changing Systems in Nanofabrication Machines
Florian Weigert
Roman Hebenstreit
René Theska
Original Article Open access 05 May 2021 Pages: 181 - 189
Heterodyne Standing-Wave Interferometer with Improved Phase Stability
Ingo Ortlepp
Jens-Peter Zöllner
Eberhard Manske
Original Article Open access 23 June 2021 Pages: 190 - 199
A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements
Guido Straube
Juan Sebastian Fischer Calderón
Eberhard Manske
Original Article Open access 23 April 2021 Pages: 200 - 207

Volume 4, Issue 3

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