1. Foreword to the Special Issue on Micro- and Nano-Metrology in Japan (I)

   • Yuki Shimizu
   • Yasuhiro Mizutani
   • Masaki Michihata

   Foreword 27 February 2021 Pages: 1 - 2

2. Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology

   • Yuki Shimizu

   Review Paper Open access 16 January 2021 Pages: 3 - 27

   

3. In-Process Diameter Measurement Technique for Micro-Optical Fiber with Standing Wave Illumination

   • Masaki Michihata
   • Zhao Zheng
   • Satoru Takahashi

   Original Article Open access 13 January 2021 Pages: 28 - 36

   

4. Ghost Imaging with Deep Learning for Position Mapping of Weakly Scattered Light Source

   • Yasuhiro Mizutani
   • Shoma Kataoka
   • Yasuhiro Takaya

   Original Article Open access 04 January 2021 Pages: 37 - 45

   

5. Measurement Method of Internal Residual Stress in Plastic Parts Using Terahertz Spectroscopy

   • Yusuke Kajihara
   • Rio Takahashi
   • Shigeo Miyake

   Original Article 25 January 2021 Pages: 46 - 52

   

6. Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors

   • Hiraku Matsukuma
   • Keisuke Adachi
   • Yoshihiro Sasaki

   Original Article 21 January 2021 Pages: 53 - 66