Dependence of the Resistance of the Negative e-Beam Resist HSQ Versus the Dose in the RIE and Wet Etching Processes A. V. MiakonkikhN. A. OrlikovskiyK. V. Rudenko OriginalPaper 05 May 2018 Pages: 157 - 164
Helium Bubbles Formed in Si(001) Layers after High-Dose Implantation and Thermal Annealing A. A. LomovA. V. MyakonkikhYu. M. Chesnokov OriginalPaper 05 May 2018 Pages: 165 - 174
Laser Method of Evaluating Parameters of LSI Sensitivity to the Impact of Single Ions A. I. Chumakov OriginalPaper 05 May 2018 Pages: 175 - 180
Geometric Effects in Current-Voltage Characteristics of a Cross-Shaped MDM Ni/NiO/Fe Structure I. V. MalikovV. A. BerezinG. M. Mikhailov OriginalPaper 05 May 2018 Pages: 181 - 186
Magnetic Force Microscopy of Iron and Nickel Nanowires Fabricated by the Matrix Synthesis Technique D. A. BizyaevA. A. BukharaevI. M. Doludenko OriginalPaper 05 May 2018 Pages: 187 - 196
Investigating the Dynamic Characteristics of High-Temperature SOI CMOS VLSIC Elements A. S. BenediktovN. A. ShelepinA. G. Potupchik OriginalPaper 05 May 2018 Pages: 197 - 200
Calculating the High-Frequency Electrical Conductivity of a Thin Metallic Layer for an Ellipsoidal Fermi Surface I. A. KuznetsovaD. N. RomanovA. A. Yushkanov OriginalPaper 05 May 2018 Pages: 201 - 210
Finite Element Simulation of Frequency Response of MEMS-Microphone D. M. Grigor’evI. V. GodovitsynS. S. Generalov OriginalPaper 05 May 2018 Pages: 211 - 216
Experimental Evaluation of Reliability of Deep Submicron SOI MOS Transistors at High Temperatures A. S. BenediktovN. A. ShelepinP. V. Ignatov OriginalPaper 05 May 2018 Pages: 217 - 220