1. Atomic Layer Deposition in the Production of a Gate HkMG Stack Structure with a Minimum Topological Size of 32 nm

   • K. V. Rudenko
   • A. V. Myakon’kikh
   • V. A. Gvozdev

   OriginalPaper 10 March 2018 Pages: 1 - 10

2. Simulating the Effects of Internal Mechanical Stresses on the Decomposition Kinetics of a Supersaturated Oxygen Solution in Silicon

   • T. M. Makhviladze
   • M. E. Sarychev

   OriginalPaper 10 March 2018 Pages: 11 - 19

3. Simulation of Single Event Effects in STG DICE Memory Cells

   • Yu. V. Katunin
   • V. Ya. Stenin

   OriginalPaper 10 March 2018 Pages: 20 - 33

4. Visualization of Defects on the Semiconductor Surface Using a Dielectric Barrier Discharge

   • D. V. Sitanov
   • S. A. Pivovarenok

   OriginalPaper 10 March 2018 Pages: 34 - 39

5. Studying the Thermodynamic Characteristics of Anodic Alumina

   • A. I. Vorob’eva
   • D. L. Shimanovich
   • O. A. Sycheva

   OriginalPaper 10 March 2018 Pages: 40 - 49

6. Basic Techniques of Increasing Resolution of Photopolymerizable Compositions

   • V. M. Treushnikov
   • S. P. Molodnyakov
   • V. V. Semenov

   OriginalPaper 10 March 2018 Pages: 50 - 64

7. A System for Logical Design of Custom CMOS VLSI Functional Blocks with Reduced Power Consumption

   • P. N. Bibilo
   • N. A. Avdeev
   • L. D. Cheremisinova

   OriginalPaper 10 March 2018 Pages: 65 - 81