1. Etching of Gallium Arsenide in a Cl2 + H2 Plasma

   • A. M. Efremov
   • A. V. Antonov

   OriginalPaper Pages: 1 - 6

2. Oscillations in Ballistic FETs

   • S. V. Obolenskii
   • M. A. Kitaev

   OriginalPaper Pages: 7 - 11

3. Enhanced Generation of Interface States in MIS IC Elements under the Action of UV and X-ray Radiations

   • M. N. Levin
   • E. N. Bormontov
   • A. V. Tatarintsev

   OriginalPaper Pages: 12 - 16

4. The Effect of Ballistic Conduction Electrons on the Current–Voltage Characteristics of Thin-Film Bismuth-Based Cross-Shaped Microstructures

   • A. I. Il'in
   • L. I. Aparshina
   • B. N. Tolkunov

   OriginalPaper Pages: 17 - 21

5. The Formation of Silicon Dioxide Films by TEOS Photochemical Decomposition

   • A. M. Svetlichnyi
   • V. V. Polyakov
   • Yu. N. Varzarev

   OriginalPaper Pages: 22 - 26

6. Microsystems Engineering: A Great Stride Forward in Microelectronics Technology

   • P. P. Mal'tsev

   OriginalPaper Pages: 27 - 28

7. Acoustic Microscopy in Micrometrology

   • V. S. Kuznetsov
   • S. A. Ogorodnikov
   • A. V. Prokaznikov

   OriginalPaper Pages: 29 - 34

8. The Structure of Complex Thin-Film Systems from Ellipsometric Simulation: A PbI2–Cu Photoresist

   • N. V. Sopinskii

   OriginalPaper Pages: 35 - 39

9. Anomalous Dependence of Small-Angle IR Scattering on Photoexcitation Power and Surface-Layer Defects in Mechanically Polished Silicon and Germanium Single Crystals

   • V. A. Yur'ev

   OriginalPaper Pages: 40 - 42

10. Low-Voltage Complementary Push-Pull Inverters for ULSI: Simulation and Prospects

    • A. N. Bubennikov
    • A. V. Zykov

    OriginalPaper Pages: 43 - 53

11. A Circuit-Design Model of a Digital Neuron Operating with the Mean Value of a Stochastic Stream

    • A. V. Luk'yanov

    OriginalPaper Pages: 54 - 58

12. A High-Speed Pseudorandom Test Pattern Generator

    • I. A. Murashko
    • V. N. Yarmolik

    OriginalPaper Pages: 59 - 66