Volume 7, Issue 4 | Plasma Chemistry and Plasma Processing

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Volume 7, Issue 4

December 1987

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5 articles in this issue

In situ FTIR diagnostics of the radio-frequency plasma decomposition of N₂O
T. A. Cleland
D. W. Hess
OriginalPaper Pages: 379 - 394
Optical diagnostic studies of trimethyl phosphine-containing radio-frequency discharges
L. Brown
V. M. Donnelly
V. R. McCrary
OriginalPaper Pages: 395 - 408
Experimental study of a d.c. oxygen glow discharge by V.U.V. absorption spectroscopy
Gérard Gousset
Pierre Panafieu
Marinette Vialle
OriginalPaper Pages: 409 - 427
Mechanism of plasma polymerization ofN-silyl-substituted cyclodisilazane: Structure and properties of polymer film
A. M. Wróbel
OriginalPaper Pages: 429 - 450
Comparison of microwave and lower-frequency discharges for plasma polymerization
R. Claude
M. Moisan
Z. Zakrzewski
OriginalPaper Pages: 451 - 464