1. Charging Effect in Basic and Complex Mask Patterns During Plasma Etching

   • Peng Zhang
   • Dengmei Li

   Original Paper 03 August 2022 Pages: 1211 - 1222

   

2. Silica sputtering by noble gas projectiles: elucidating the effect of cluster species with molecular dynamic simulation

   • N. G. Korobeishchikov
   • P. V. Stishenko
   • V. V. Yakovlev

   Original Paper 21 September 2022 Pages: 1223 - 1235

   

3. Study of the Electron Density in an Inductively Coupled Plasma of Fluorine-Hydrogen-Argon Gas Mixture

   • Sergey Sintsov
   • Dmitry Mansfeld
   • Alexander Vodopyanov

   Original Paper 24 August 2022 Pages: 1237 - 1247

   

4. Efficient Corona Discharge Fog Collector: Multiple Mesh Electrodes with Electric Field Enhances Fog Harvesting

   • Dingchen Li
   • Chuan Li
   • Yuan Pan

   Original Paper 24 August 2022 Pages: 1249 - 1264

   

5. Chemical Kinetics of C₅F₁₀O with Reactive ·OH Radical Induced in AOP in Gaseous and Aqueous Phases

   • Yuwei Fu
   • Santu Luo
   • Dingxin Liu

   Original Paper 12 August 2022 Pages: 1265 - 1278

   

6. Cr(VI) Reduction by Microsecond Pin-to-Pin Discharges Generated in an Aqueous Solution

   • T. S. Nguyen
   • N. Fagnon
   • C. Rond

   Original Paper 06 September 2022 Pages: 1279 - 1290

   

7. Rapid Inactivation of E. coli by Water Droplet-Tuned Surface Micro-Discharges

   • Xi Wang
   • Zhihua Qi
   • Dongping Liu

   Original Paper 19 August 2022 Pages: 1291 - 1310

   

8. Investigation of Rotating Arc-Catalytic Reactor for CF₄ Removal with High Energy Efficiency

   • Sungkwon Jo
   • Donghyun Cho
   • Woo Seok Kang

   Original Paper 22 July 2022 Pages: 1311 - 1327

   

9. Comparison Study of Two Atmospheric Pressure Plasma Jet Configurations for Plasma-Catalyst Development

   • Wameedh Adress
   • W. G. Graham

   Original Paper 25 August 2022 Pages: 1329 - 1344

   

10. The Effect of the Process Parameters on the Composition and Properties of Silica-Like Films Deposited by Atmospheric Pressure PECVD in the System TEOS-He-O₂

    • Anastasia S. Bil
    • Sergey E. Alexandrov

    Original Paper 23 September 2022 Pages: 1345 - 1360

    

11. Analysis of the Thermal Decomposition Path of SF₆ on the Surface of Cu and its Oxides

    • Fuping Zeng
    • Kexin Zhu
    • Ju Tang

    Original Paper 30 July 2022 Pages: 1361 - 1380

    

12. Modeling of Thermogasdynamics and Thermal Processes of Volatile Halides of Elements of III, IV and VI Groups in Thermal Plasma of RF-IC Discharge at Atmospheric Pressure

    • L. V. Shabarova
    • R. A. Kornev
    • P. S. Kalyasov

    Original Paper 12 August 2022 Pages: 1381 - 1403