1. Intermediate and high-mass ion beams from a 10-cm Duopigatron

   • P. D. Weber
   • R. M. Gilgenbach

   OriginalPaper Pages: 75 - 88

2. Mass spectrometric diagnosis of the surface nitriding mechanism in a d.c. glow discharge

   • Andreas Szabo
   • Herbert Wilhelmi

   OriginalPaper Pages: 89 - 105

3. Mass spectrometer-wall probe diagnostic of Ar discharges containing SF₆ and/or O₂: Reactive ions in etching plasmas

   • H. G. Lergon
   • M. Venugopalan
   • K. G. Müller

   OriginalPaper Pages: 107 - 118

4. H₂ plasma development of X-ray imaged patterns on plasma-polymerized resists

   • Masaru Hori
   • Tetsuya Miwa
   • Shinzo Morita

   OriginalPaper Pages: 119 - 127

5. Effects of metallic vapor on the properties of an argon arc plasma

   • J. Mostaghimi-Tehrani
   • E. Pfender

   OriginalPaper Pages: 129 - 139