1. Radiofrequency plasma decomposition of C _n F_2n+2-H₂ and CF₄-C₂F₄ mixtures during Si etching or fluoropolymer deposition

   • Riccardo d'Agostino
   • Santolo De Benedictis
   • Francesco Cramarossa

   OriginalPaper Pages: 1 - 14

2. Decomposition of an organophosphorus material in a silent electrical discharge

   • Eugene J. Clothiaux
   • John A. Koropchak
   • Robert R. Moore

   OriginalPaper Pages: 15 - 20

3. Chemical mechanisms in C₃F₈-H₂ radiofrequency discharges

   • Riccardo d'Agostino
   • Francesco Cramarossa
   • Santolo De Benedictis

   OriginalPaper Pages: 21 - 31

4. Nitriding of titanium with plasma jet under reduced pressure

   • Osamu Matsumoto
   • Eiji Hayami
   • Yasushi Kanzaki

   OriginalPaper Pages: 33 - 42

5. Static pressure and heat flux measurements of a thermal argon plasma flow in a water-cooled tube

   • Masakazu Kobayashi
   • Takuya Honda
   • Atsushi Kanzawa

   OriginalPaper Pages: 43 - 57

6. Thermal decomposition of carbon dioxide in an argon plasma jet

   • A. Huczko
   • A. Szymański

   OriginalPaper Pages: 59 - 72

7. Announcements

   Announcement Pages: 73 - 73