Electrical properties of plasma-polymerized thin organic films Maciej GazickiH. Yasuda OriginalPaper Pages: 279 - 327
Kinetic studies of SF6 plasmas during etching of Si Werner W. BrandtJohn J. Wagner OriginalPaper Pages: 329 - 336
Kinetic studies on CF4 plasmas during etching of Si Werner W. BrandtPaul Roselle OriginalPaper Pages: 337 - 342
Plasma chemical synthesis. I. Effect of electrode material on the synthesis of ammonia Khin Swe YinMundiyath Venugopalan OriginalPaper Pages: 343 - 350
Behavior of small particles in a thermal plasma flow Xi ChenE. Pfender OriginalPaper Pages: 351 - 366