1. Two-Temperature Transport Coefficients in Argon–Hydrogen Plasmas—I: Elastic Processes and Collision Integrals

   • V. Rat
   • P. André
   • A. Lefort

   OriginalPaper Pages: 453 - 474

2. Two-Temperature Transport Coefficients in Argon–Hydrogen Plasmas—II: Inelastic Processes and Influence of Composition

   • V. Rat
   • P. André
   • A. Lefort

   OriginalPaper Pages: 475 - 493

3. Ozone Production in the Positive DC Corona Discharge: Model and Comparison to Experiments

   • Junhong Chen
   • Jane H. Davidson

   OriginalPaper Pages: 495 - 522

4. Influence of Gadolinium on Carbon Arc Plasma and Formation of Fullerenes and Nanotubes

   • H. Lange
   • A. Huczko
   • A. Gleizes

   OriginalPaper Pages: 523 - 536

5. Decomposition of Benzene in Air in a Plasma Reactor: Effect of Reactor Type and Operating Conditions

   • A. Ogata
   • K. Miyamae
   • M. Tezuka

   OriginalPaper Pages: 537 - 552

6. Density and Rotational Temperature Measurements of the OH° and NO° Radicals Produced by a Gliding Arc in Humid Air

   • B. Benstaali
   • P. Boubert
   • J. L. Brisset

   OriginalPaper Pages: 553 - 571

7. Formation of Negative Hydrogen Ions in a Ne–H₂ Hollow Cathode Discharge

   • G. M. Petrov
   • Ts. Petrova

   OriginalPaper Pages: 573 - 605

8. Deposition of Diamond-Like Carbon Film in a Closed-Space CH₄ RF Plasma

   • N. Mutsukura
   • Y. Handa

   OriginalPaper Pages: 607 - 617

9. Optical Diagnostics of the Effect of Oxygen on Bi-Level Contact Etch

   • S. Lee
   • Y.-C. Tien
   • Y.-W. Chang

   OriginalPaper Pages: 619 - 626

10. Effect of Wafer Temperature on High Aspect Ratio Hardmask Etching

    • S. Lee
    • Y.-C. Tien
    • Y.-W. Chang

    OriginalPaper Pages: 627 - 637

11. PAHs Formation in the Depositions in a Methyl tert-Butyl Ether/Ar, a Methyl tert-Butyl Ether/O₂/Ar and a Methyl tert-Butyl Ether/H₂/Ar RF Plasma Environment

    • L.-T. Hsieh
    • G.-C. Fang
    • W.-T. Liao

    OriginalPaper Pages: 639 - 658