The use of electrostatic probes for plasma diagnostics—A review B. E. Cherrington ReviewPaper Pages: 113 - 140
Plasma etch chemistry of aluminum and aluminum alloy films Dennis W. Hess OriginalPaper Pages: 141 - 155
Effect of heating on dissociation of water vapor in high-frequency plasmas and formation of hydrogen peroxide in a cold trap downstream of the plasma S. RoychowdhuryU. K. RoychowdhuryM. Venugopalan OriginalPaper Pages: 157 - 166
Experiment planning, mathematical modelling, and nonlinear optimization of the ion-nitriding process in a glow-discharge plasma O. PetruşG. PopaS. Kuhn OriginalPaper Pages: 167 - 183
Heat transfer to a single particle exposed to a thermal plasma Xi ChenE. Pfender OriginalPaper Pages: 185 - 212
