1. Reactions of hydrocarbons in a supersonic vacuum plasma jet

   • H. Pauser
   • C. G. Schwärzler
   • H. Störi

   OriginalPaper Pages: 107 - 121

2. DC plasma polymerization of hexamethyldisiloxane

   • W. J. van Ooij
   • S. Eufinger
   • Sheyu Guo

   OriginalPaper Pages: 123 - 154

3. Plasma etching of III–V semiconductors in BCl₃ chemistries: Part I: GaAs and related compounds

   • J. W. Lee
   • J. Hong
   • F. Ren

   OriginalPaper Pages: 155 - 167

4. Plasma etching of III–V semiconductors in BCl₃ chemistries: Part II: InP and related compounds

   • J. W. Lee
   • J. Hong
   • F. Ren

   OriginalPaper Pages: 169 - 179

5. Optical emission spectroscopy as a real time diagnostic tool for plasma-assisted deposition of TiN

   • Mohamed Boumerzoug
   • Marcel Boudreau
   • Peter Mascher

   OriginalPaper Pages: 181 - 192

6. Characterization of an argon-hydrogen microwave discharge used as an atomic hydrogen source. Effect of hydrogen dilution on the atomic hydrogen production

   • L. Thomas
   • J. L. Jauberteau
   • A. Catherinot

   OriginalPaper Pages: 193 - 206

7. Comparison between Gibbs free energy minimization and mass action law for a multitemperature plasma with application to nitrogen

   • P. Andre
   • M. Abbaoui
   • A. Lefort

   OriginalPaper Pages: 207 - 217

8. Effects of process parameters on ultrafine SiC synthesis using induction plasmas

   • J. Y. Guo
   • F. Gitzhofer
   • M. I. Boulos

   OriginalPaper Pages: 219 - 249

9. Impact of copper vapor contamination on argon arcs

   • Salim Akbar
   • Kasra Etemadi

   OriginalPaper Pages: 251 - 262