Electron energy distribution functions and rate and transport coefficients of H2/H/CH4 reactive plasmas for diamond film deposition M. CapitelliG. ColonnaA. Gicquel OriginalPaper Pages: 153 - 171
On the plasma chemistry of the C/H system relevant to diamond deposition processes C. G. SchwärzlerO. SchnablH. Störi OriginalPaper Pages: 173 - 185
Kinetics of O2 + TEOS gas-phase chemical reactions in a remote RF plasma reactor with electron spin resonance J. JančaA. TálskýV. Zvoníček OriginalPaper Pages: 187 - 194
Surface recombination in breakdown time delay experiments: Effect of different cathode materials V. Lj. MarkovićM. M. PejovićZ. Lj. Petrović OriginalPaper Pages: 195 - 208
Plasma and beam facility atomic oxygen erosion of a transition metal complex M. L. IllingsworthB. A. BanksK. K. de Groh OriginalPaper Pages: 209 - 225
Energy efficiency of NO removal by pulsed corona discharges E. M. van VeldhuizenW. R. RutgersV. A. Bityurin OriginalPaper Pages: 227 - 247
Homogeneous nucleation of metals in a plasma-quench reactor Randall A. LaVioletteRay A. BerryRobert McGraw OriginalPaper Pages: 249 - 264
Numerical simulation of a nonequilibrium plasma jet in an applied magnetic field using three-fluid model Hideya NishiyamaToshiaki SaitoShin-ichi Kamiyama OriginalPaper Pages: 265 - 286