The mechanism of plasma-induced deposition of amorphous silicon from silane S. VepřekM. Heintze OriginalPaper Pages: 3 - 26
Mass spectrometric study of SF6-N2 plasma during etching of silicon and tungsten Nobuki MutsukuraGuy Turban OriginalPaper Pages: 27 - 47
Fast deposition of amorphous hydrogenated carbon films using a supersonically expanding arc plasma G. M. W. KroesenD. C. SchramM. J. F. van de Sande OriginalPaper Pages: 49 - 69
Hydrodynamics and heat transfer in a plasma spouted bed reactor G. Flamant OriginalPaper Pages: 71 - 85
Numerical simulation of a free-burning argon arc with copper evaporation from the anode G. Y. ZhaoM. DassanayakeK. Etemadi OriginalPaper Pages: 87 - 98
Characteristics of transferred-arc plasmas at high TiCl4 concentrations P. TsantrizosW. H. Gauvin OriginalPaper Pages: 99 - 113
Gas and liquid phases interaction at the FeO·Cr2O3 cathode of a direct-current arc discharge H. LangeP. Meubus OriginalPaper Pages: 115 - 131
The induction plasma chemical reactor: Part I. Equilibrium model G. Y. ZhaoJ. MostaghimiM. I. Boulos OriginalPaper Pages: 133 - 150
The induction plasma chemical reactor: Part II. Kinetic model G. Y. ZhaoJ. MostaghimiM. I. Boulos OriginalPaper Pages: 151 - 166
Modeling of an inductively coupled plasma at reduced pressures S. H. PaikE. Pfender OriginalPaper Pages: 167 - 188
One-dimensional analysis of the wall region for a multiple-temperature argon plasma Tarit K. Bose OriginalPaper Pages: 189 - 206