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Basistechnologien der Mikrosystemtechnik

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Praxiswissen Mikrosystemtechnik

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Die typische Umgebung für die Entwicklung und Fertigung von mikrotechnischen Produkten ist der Reinraum. Er gewährleistet saubere Umgebungsbedingungen in Form von gefilterter Luft in dem Bereich, in dem Substrate partikelarm mit geeigneten Prozessmedien und -anlagen prozessiert und gehandhabt werden. Außerdem erfolgt in peripheren Einheiten die Bereitstellung aller erforderlichen Medien (z. B. Prozessgase, Druckluft, DI-Wasser, Kühlwasser, Stromversorgung, Vakuum) sowie die Entsorgung (toxische Abluft, Abwasserneutralisation). Der eigentliche Reinraum, die erforderliche Klimatechnik und die peripheren Einheiten bilden einen komplex organisierten, zusammenhängenden und mit Hilfe von Sensoren überwachten Bereich. Seine detaillierte Auslegung, geometrische Anordnung und Eigenschaften werden durch die Anwendung, d. h. die in dieser Fertigungsumgebung herzustellenden Produkte, definiert. Die Größe eines Reinraums kann dabei wenige Quadratmeter (z. B. für einen isolierten Mikromontageplatz) oder mehrere tausend Quadratmeter für eine komplette Prozesslinie (z. B. eine Speicherchipfertigung) betragen.

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(2006). Basistechnologien der Mikrosystemtechnik. In: Praxiswissen Mikrosystemtechnik. Vieweg+Teubner. https://doi.org/10.1007/978-3-8348-9105-1_2

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