Abstract
The structure of an Atomic force microscope (AFM) probe that integrates fast electrostatic actuation and highly sensitive optical interferometric detection of tip motion is described. The use of this so-called FIRAT probe for quantitative material characterization with high spatial resolution is demonstrated through contact and adhesion modeling. Time resolved interaction forces between the AFM tip and the sample surface is used to map material properties of several samples including silicon, polymer and carbon nanotubes. Non-resonant tapping mode operation of the FIRAT probe has also been demonstrated for use with existing commercial AFM systems.
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Degertekin, F., Balantekin, M., Onaran, A. (2008). Quantitative Material Characterization and Imaging at Nanoscale Using a New AFM Probe. In: Akiyama, I. (eds) Acoustical Imaging. Acoustical Imaging, vol 29. Springer, Dordrecht. https://doi.org/10.1007/978-1-4020-8823-0_30
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DOI: https://doi.org/10.1007/978-1-4020-8823-0_30
Publisher Name: Springer, Dordrecht
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