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Microfabrication of a dual-mode rectangular waveguide filter

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Abstract

This paper reports the design and microfabrication of an F-band rectangular waveguide filter. The filter was designed to have a double-cavity structure to achieve dual-mode filtering. The filter was modeled and simulated using the commercial software, HFSS. The waveguide filter was designed to have a central frequency of 100 GHz. The prototypes of the filter were fabricated using a technology based on ultra-violet lithography of thick resist of SU-8. The fabrication errors were found to be <5 μm in height and 1.3° in vertical angle deviations. The experimental results of the filters were found to be in agreement with those from numerical simulations, with the insert loss at 0.8 dB and the return loss better than 15 dB. The study has confirmed the feasibility of the filter and the fabrication technology. Because the structural material of this waveguide filter is polymer, batch fabrication with low cost replication using PDMS intermediate mold can be readily adopted as commonly practiced in the field of polymer-based microfabrication. This technology therefore may potentially reduce the production cost of millimeter wave filter dramatically.

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Acknowledgments

This research work presented in this paper had been financially supported by Grant #61401405 and Grant #51475438 from the National Science Foundation of China and the National Science Fund for Distinguished Young Scholars of China (Grant No. 51225504). The experimental work was conducted at State Key Laboratory for Manufacturing Systems Engineering of The North University of China and The State Key Laboratory for Manufacturing System Engineering of Xian Jiaotong University of China.

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Authors and Affiliations

  1. Key Laboratory of Instrumentation Science and Dynamic Measurement and Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, 030051, Shanxi, China

    Junping Duan, Binzhen Zhang, Jun Liu, Jun Tang & Wanjun Wang

  2. School of Instrument and Electronics, North University of China, Taiyuan, 030051, China

    Jun Liu & Chengyang Xue

  3. College of Telecommunications, Xian Jiaotong University, Xi’an, 70049, China

    Anxue Zhang

Authors
  1. Junping Duan
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  2. Binzhen Zhang
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  3. Anxue Zhang
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  4. Jun Liu
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  5. Chengyang Xue
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  6. Jun Tang
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  7. Wanjun Wang
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Correspondence to Wanjun Wang.

Additional information

Wanjun Wang: On leave from Department of Mechanical and Industrial Engineering, Louisiana State University, USA; Email: wang@lsu.edu or wangwanjun@nuc.edu.cn.

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Duan, J., Zhang, B., Zhang, A. et al. Microfabrication of a dual-mode rectangular waveguide filter. Microsyst Technol 22, 2011–2016 (2016). https://doi.org/10.1007/s00542-015-2508-5

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  • DOI: https://doi.org/10.1007/s00542-015-2508-5

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