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Small-size silicon accelerometer with a thermally compensated signal in the temperature range of 0–200°C

  • Mechanical Measurements
  • Published:
Measurement Techniques Aims and scope

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Literature cited

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Authors
  1. L. G. Arkharova
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  2. E. A. Zhelonkin
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  3. A. L. Kolesnikov
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  4. P. I. Pivonenkov
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  5. Yu. M. Spalek
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  6. M. Yu. Tikhomirov
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 3, pp. 24–25, March, 1991.

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Arkharova, L.G., Zhelonkin, E.A., Kolesnikov, A.L. et al. Small-size silicon accelerometer with a thermally compensated signal in the temperature range of 0–200°C. Meas Tech 34, 262–265 (1991). https://doi.org/10.1007/BF00978797

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  • DOI: https://doi.org/10.1007/BF00978797

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