Abstract
The application of automated optical inspection (AOI) to advanced manufacturing processes with tight takt time and specifications is critical in winning today’s global competition. In the past decades, great effort had been devoted to developing novel solutions for in-line optical inspection of surfaces and the dynamic characteristics of tested components or devices. Conventional approaches to microscale 3D surface profilometry have adopted novel optics or concepts in confocal microscopy for measuring 3D surface characteristics with high speed and precision. One-shot measurement capability is demanded to minimize measured uncertainty from environmental vibration or system instability. Nevertheless, extremely high-speed microscopic 3D confocal profilometric methodologies for 100% full-field inspection are yet to be developed. This chapter intends to provide the measurement principle and development of confocal optical profilometry in overcoming bottlenecks and developing feasible solutions for novel manufacturing technologies, such as roll-to-roll nanoimprinting or semiconductor processes. It contains the basic optics, the measuring algorithms and industrial applications in optical confocal microscopy required for surface profilometry.
References
Artigas R (2011) Imaging confocal microscopy. In: Leach R (ed) Optical measurement of surface topography. Springer, Heidelberg, pp 237–286
Chen LC, Chang YW, Chen SH, Li ZK, Kuo SH, Lai HW (2010) In-situ microscopic surface profilometry by lateral confocal scanning (LCS) for roll-to-roll thin-film fabrication. Paper presented at the 10th international symposium on measurement and quality, Osaka, 5–9 September 2010
Chen LC, Chang YW, Wu YL (2011a) In-situ chromatic confocal surface profilometry employing image fiber correspondence for resolving lateral cross talk problems. Paper presented at the 10th international symposium on measurement technology and intelligent instruments, Korea, 2011
Chen LC, Li HW, Chang YW (2011b) Full-field chromatic confocal surface profilometry employing DMD correspondence for minimizing lateral cross talks. Paper presented at the 10th international symposium on measurement technology and intelligent instruments, Korea, 2011
Chen LC, Chang YW, Li HW (2012) Full-field chromatic confocal surface profilometry employing DMD correspondence for minimizing lateral cross talks. Opt Eng 51(8). https://doi.org/10.1117/1.OE.51.8.081507
Chen LC, Le MT, Phuc DC, Lin ST (2014) In-situ volumetric topography of IC chips for defect detection using infrared confocal measurement with active structured light. Meas Sci Technol 25(9):094013
Chen LC, Nguyen DT, Chang YW (2016) Precise optical surface profilometry using innovative chromatic differential confocal microscopy. Opt Lett 41(24):5660–5663
Minsky M (1961) Microscopy apparatus. US patent 3,013,467, 19 Dec 1961
Nayar SK, Nakagawa Y (1990) Shape from focus: an effective approach for rough surfaces. In: International conference on robotics and automation, vol 1, pp 218–225, May 1990
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2019 Springer Nature Singapore Pte Ltd.
About this entry
Cite this entry
Chen, LC. (2019). Confocal Microscopy for Surface Profilometry. In: Gao, W. (eds) Metrology. Precision Manufacturing. Springer, Singapore. https://doi.org/10.1007/978-981-10-4912-5_3-1
Download citation
DOI: https://doi.org/10.1007/978-981-10-4912-5_3-1
Received:
Accepted:
Published:
Publisher Name: Springer, Singapore
Print ISBN: 978-981-10-4912-5
Online ISBN: 978-981-10-4912-5
eBook Packages: Springer Reference EngineeringReference Module Computer Science and Engineering