An Offset Compensation Method for Integrated Thermal Flow Sensors

Bruschi, P.; Dei, M.; Piotto, M.

doi:10.1007/978-90-481-3606-3_44

P. Bruschi⁵,
M. Dei⁵ &
M. Piotto⁶

Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 54))

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Abstract

The effectiveness of a new method for the offset compensation of integrated thermal flow sensors is demonstrated. The method is based on flow sensors with a double heater configuration, designed with a commercial CMOS process and fabricated by means of a post–processing technique. The power unbalance between the two heaters is used to compensate the unavoidable sensor offset. Measurements in nitrogen at room temperature confirm an offset decrease by nearly one order of magnitude.

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References

B. W. van Oudheusden, “Silicon thermal flow sensors”, Sensors and Actuators A, [vol. 30], pp. 5–26, 1992.
Article Google Scholar
S. P. Matova, K. A. Makinwa, and J. H. Huijsing, “Compensation of packaging asymmetry in a 2-D wind sensor” IEEE Sensors Journal, [vol. 3], pp. 761–765, 2003.
Article Google Scholar
P. Bruschi, M. Piotto, and N. Bacci, “Postprocessing technologies, interface circuits and packaging strategies for CMOS compatible gas flow sensors”, proc. of IWASI 2007, Bari 26-27 June 2007, pp. 117–122, 2007.
Google Scholar
P. Bruschi, M. Dei, and M. Piotto, “Single chip sensing of multiple gas flows”, proc. of DTIP 2008, Nice 9-11 April 2008, pp. 242–246, 2008.
Google Scholar

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Authors and Affiliations

Dipartimento di Ingegneria dell’Informazione, Università di Pisa, Via G. Caruso, 16, 56122, Pisa, Italy
P. Bruschi & M. Dei
IEIIT – Pisa, CNR, Via G. Caruso, 16, 56122, Pisa, Italy
M. Piotto

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P. Bruschi
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M. Dei
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M. Piotto
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Editors and Affiliations

Dipto. Ingegneria Elettrica, Università di Pavia, Via Ferrata 1, Pavia, 27100, Italy
Piero Malcovati
Dipto. Fisica, Università Milano-Bicocca, Piazza della Scienza 3, Milano, 20126, Italy
Andrea Baschirotto
Dipto. Ingegneria Elettronica, Università di Roma, Tor Vergata, Via del Politecnico 1, Roma, 00133, Italy
Arnaldo d'Amico
Dipto. Ingegneria Eletronica, Universita di Roma - Tor Vergata, Via Orazio Raimondo, Roma, 00173, Italy
Corrado Natale

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Bruschi, P., Dei, M., Piotto, M. (2010). An Offset Compensation Method for Integrated Thermal Flow Sensors. In: Malcovati, P., Baschirotto, A., d'Amico, A., Natale, C. (eds) Sensors and Microsystems. Lecture Notes in Electrical Engineering, vol 54. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-3606-3_44

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DOI: https://doi.org/10.1007/978-90-481-3606-3_44
Published: 28 November 2009
Publisher Name: Springer, Dordrecht
Print ISBN: 978-90-481-3605-6
Online ISBN: 978-90-481-3606-3
eBook Packages: EngineeringEngineering (R0)

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