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© 2004 Springer-Verlag Berlin Heidelberg
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Franz, G. (2004). Bildquellennachweis. In: Niederdruckplasmen und Mikrostrukturtechnik. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-18769-8_16
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DOI: https://doi.org/10.1007/978-3-642-18769-8_16
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-62284-7
Online ISBN: 978-3-642-18769-8
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