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Interactions Between the Different Chemical Species in Sputtered Silicon Amorphous Structure

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Nuclear Physics Methods in Materials Research

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Abstract

Hydrogen depth profiling by nuclear reaction and Rutherford backscattering have been used to Investigate a-S1. Ohmic contacts have been achieved by diffusion of hydrogen. Arsenic Is associated with an augmentation of hydrogen.

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Author information

Authors and Affiliations

  1. CRN, Groupe PHASE, 67037, Strasbourg Cedex, France

    M. Toulemonde, J. J. Grob & P. Siffert

  2. Groupe des Transitions de Phases, CNRS, 38042, Grenoble Cedex, France

    A. Deneuville & J. C. Bruyere

Authors
  1. M. Toulemonde
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  2. J. J. Grob
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  3. P. Siffert
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  4. A. Deneuville
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  5. J. C. Bruyere
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Editor information

Klaus Bethge Horst Baumann Hartmut Jex Friedrich Rauch

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© 1980 Friedr. Vieweg & Sohn Verlagsgesellschaft mbH, Braunschweig

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Toulemonde, M., Grob, J.J., Siffert, P., Deneuville, A., Bruyere, J.C. (1980). Interactions Between the Different Chemical Species in Sputtered Silicon Amorphous Structure. In: Bethge, K., Baumann, H., Jex, H., Rauch, F. (eds) Nuclear Physics Methods in Materials Research. Vieweg+Teubner Verlag. https://doi.org/10.1007/978-3-322-85996-9_31

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  • DOI: https://doi.org/10.1007/978-3-322-85996-9_31

  • Publisher Name: Vieweg+Teubner Verlag

  • Print ISBN: 978-3-528-08489-9

  • Online ISBN: 978-3-322-85996-9

  • eBook Packages: Springer Book Archive

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