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International Conference on Intelligent Robotics and Applications

ICIRA 2016: Intelligent Robotics and Applications pp 51–62Cite as

Combined Model-Free Decoupling Control and Double Resonant Control in Parallel Nanopositioning Stages for Fast and Precise Raster Scanning

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Part of the book series: Lecture Notes in Computer Science ((LNAI,volume 9834))

Abstract

A design of double resonant control combined with a model-free decoupling filter (MFDF) is presented in this paper. The design is demonstrated using the proposed MFDF to decouple a parallel multi-input multi-output (MIMO) system into several single-input single-output systems and applying a double resonant controller for vibration damping and cross coupling reduction in nanopositioners. Raster scan results of simulations based on an identified MIMO transfer function of a nanopositioning stage over an area of 4 μm × 0.4 μm with small RMS errors are demonstrated. Comparisons with using the double resonant controller alone show the effectiveness of the proposed controller.

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Acknowledgment

This research was sponsored by National Natural Science Foundation of China (NSFC, Grant No. 51375349).

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Authors and Affiliations

  1. School of Power and Mechanical Engineering, Wuhan University, Wuhan, 430072, China

    Jie Ling, Zhao Feng, Min Ming & Xiaohui Xiao

Authors
  1. Jie Ling
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  2. Zhao Feng
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  3. Min Ming
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  4. Xiaohui Xiao
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Corresponding author

Correspondence to Xiaohui Xiao .

Editor information

Editors and Affiliations

  1. Tokyo Metropolitan University , Tokyo, Japan

    Naoyuki Kubota

  2. Kyushu University , Fukuoka, Japan

    Kazuo Kiguchi

  3. University of Portsmouth , Portsmouth, United Kingdom

    Honghai Liu

  4. Tokyo Metropolitan University , Tokyo, Japan

    Takenori Obo

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© 2016 Springer International Publishing Switzerland

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Ling, J., Feng, Z., Ming, M., Xiao, X. (2016). Combined Model-Free Decoupling Control and Double Resonant Control in Parallel Nanopositioning Stages for Fast and Precise Raster Scanning. In: Kubota, N., Kiguchi, K., Liu, H., Obo, T. (eds) Intelligent Robotics and Applications. ICIRA 2016. Lecture Notes in Computer Science(), vol 9834. Springer, Cham. https://doi.org/10.1007/978-3-319-43506-0_5

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  • DOI: https://doi.org/10.1007/978-3-319-43506-0_5

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-43505-3

  • Online ISBN: 978-3-319-43506-0

  • eBook Packages: Computer ScienceComputer Science (R0)

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