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Microfluidic Electrophoresis pp 13–54Cite as

Soft Lithography, Molding, and Micromachining Techniques for Polymer Micro Devices

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Part of the book series: Methods in Molecular Biology ((MIMB,volume 1906))

Abstract

This chapter enumerates the methods, protocol, and safety procedures of various fabrication techniques for polymer-based microfluidic devices. The polymer materials can be a solid or a liquid, and the fabrication protocol needs to be executed accordingly. Various techniques demonstrating the fabrication of microfluidic devices using solid and liquid polymers are described. Procedure for each fabrication process is delineated with detailed images. Further, dos and don’ts for all the fabrication techniques are explained in the notes of each section. This chapter will benefit those interested in the microfluidic device fabrication using polymers and guide them to avoid mistakes so as to obtain an elegant device.

The techniques are listed as follows:

  1. 1.

    Replica molding

  2. 2.

    Microcontact printing

  3. 3.

    Micro-transfer molding

  4. 4.

    Solvent-assisted molding

  5. 5.

    Hot embossing

  6. 6.

    Injection molding

  7. 7.

    CNC micromachining

  8. 8.

    Laser photo ablation

  9. 9.

    X-ray lithography

  10. 10.

    UV patterning

  11. 11.

    Plasma etching

  12. 12.

    Ion beam etching

  13. 13.

    Capillary molding

  14. 14.

    Micro-stereolithography

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References

  1. Nguyen NT (2008) Micromixers: fundamentals, design, and fabrication. William Andrew, New York

    Google Scholar 

  2. Mcdonald JC, Duffy DC, Anderson JR, Chiu DT, Wu H, Schueller OJ, Whitesides GM (2000) Fabrication of microfluidic systems in poly (dimethyl siloxane). Electrophoresis 21:27–40

    Article  CAS  Google Scholar 

  3. Gates BD (2005) Nanofabrication with molds & stamps. Mater Today 8(2):44–49

    Article  CAS  Google Scholar 

  4. Andras P, Reinhoudt DN, Jurriaan H (2009) Microcontact printing: limitations and achievements. Adv Mater 21:2257–2268

    Article  Google Scholar 

  5. Ruizab SA, Chen CS (2006) Micro contact printing: a tool to pattern. Soft Matter 3:168–177

    Google Scholar 

  6. Xia Y, Whitesides GM (1998) Soft lithography. Angew Chem Int Ed 37:550–575

    Article  CAS  Google Scholar 

  7. Zhao XM, Xia Y, Whitesides GM (1996) Fabrication of three-dimensional micro-structures: microtransfer molding. Adv Mater 8(10):837–840

    Article  CAS  Google Scholar 

  8. Deng T, Ha YH, Cheng JY, Ross CA, Thomas EL (2002) Micropatterning of block copolymer solutions. Langmuir 18:6719–6722

    Article  CAS  Google Scholar 

  9. Lee JH, Kim CH, Ho KM, Constant K (2005) Two-polymer microtransfer molding for highly layered microstructures. Adv Mater 17(20):2481–2485

    Article  CAS  Google Scholar 

  10. Han LL, Zhou J, Xiao G, Gao CY (2009) Solvent-assisted polymer micro-molding. Chin Sci Bull 54:2193–2204

    Article  CAS  Google Scholar 

  11. King E, Xia Y, Zhao XM, Whitesides GM (1997) Solvent-assisted microcontact molding: a convenient method for fabricating three-dimensional structures on surfaces of polymers. Adv Mater 9(8):651–654

    Article  Google Scholar 

  12. Peng L, Deng Y, Yi P, Lai X (2014) Micro hot embossing of thermoplastic polymers: a review. Micromech Microeng 24:013001

    Article  Google Scholar 

  13. Liu C, Li J, Liu J, Wang L (2010) Deformation behavior of solid polymer during hot embossing process. Microelectron Eng 87:200–207

    Article  CAS  Google Scholar 

  14. Becker H, Heim U (2000) Hot embossing as a method for the fabrication of polymer high aspect ratio structures. Sensors Actuators 83:130–135

    Article  CAS  Google Scholar 

  15. Kopeliovich D (2014) Injection molding of polymers. In: Methods of polymers fabrication. Available via SubsTech. http://www.substech.com/dokuwiki/doku.php?id=injection_molding_of_polymers. Accessed 11 July 2017

  16. The plastic injection moulding process. In: All about plastic moulding. Available via D&M. Plastics Inc. http://www.plasticmoulding.ca/techniques/injection_moulding.htm. Accessed 11 July 2017

  17. Rosato DV, Rosato MG (2000) Injection molding handbook. Springer, New York

    Book  Google Scholar 

  18. Malloy RA (1994) Plastic part design for injection molding. Hanser, Munich Vienna

    Google Scholar 

  19. Tanzi S, Ostergaard PF, Matteucci M, Christiansen TL, Cech J, Marie R, Taboryski R (2012) Fabrication of combined-scale nano- and microfluidic polymer systems using a multilevel dry etching, electroplating and molding process. J Micromech Microeng 22:115008

    Article  Google Scholar 

  20. Guckenberger DJ, Groot TE, Wan AMD, Beebe DJ, Young EWK (2015) Micromilling: a method for ultra-rapid prototyping of plastic microfluidic devices. Lab Chip 15(11):2364–2378

    Article  CAS  Google Scholar 

  21. Khemani H (2009) What is the CNC machine? How CNC machine works? In: Manufacturing technology. Available via Bright Hub Engineering. http://www.brighthubengineering.com/manufacturing-technology/55787-what-is-the-cnc-machine-how-cnc-machine-works/. Accessed 12 July 2017

  22. Introduction to micromachining. In: Enjoy CNC micromachining & micro-cutter success: easy guide. Available via CNC Cookbook. http://www.cnccookbook.com/CCCNCMillFeedsSpeedsMicroMachining.htm. Accessed 12 July 2017

  23. Lazare S, Granier V (1988) Ultraviolet laser photoablation of polymers: a review and recent results. Laser Chem 10:25–40

    Article  Google Scholar 

  24. Urech L, Lippert T (2010) Photoablation of polymer materials. In: Allen NS (ed) Photochemistry and photophysics of polymer materials. Wiley, New York

    Google Scholar 

  25. Roberts MA, Rossier JS, Bercier P, Girault H (1997) UV laser machined polymer substrates for the development of microdiagnostic systems. Anal Chem 69:2035–2042

    Article  CAS  Google Scholar 

  26. Jackson MJ (2007) Micro and nanomanufacturing. Springer, New York, pp 55–98

    Google Scholar 

  27. Maldonado JR, Peckerar M (2016) X-ray lithography: some history, current status and future prospects. Microelectron Eng 161:87–93. https://doi.org/10.1016/j.mee.2016.03.052

    Article  CAS  Google Scholar 

  28. Sylmand X-ray lithography protocol. https://www.youtube.com/watch?v=ZEwRy2Zv0JA. Accessed 6 Aug

  29. Ford SM, Kar B, McWhorter S, Davies J, Soper SA, Klopf M, Calderon G, Saile V (1998) Microcapillary electrophoresis devices fabricated using polymeric substrates and x-ray lithography. J Microcolumn Sep 10(5):413–422

    Article  CAS  Google Scholar 

  30. Haiducu M, Rahbar M, Foulds IG, Johnstone RW, Sameoto D (2008) Deep UV patterning of the commercial grade PMMA for low-cost, large-scale microfluidics. J Micromech Microeng 18:115029 (7pp)

    Article  Google Scholar 

  31. Etching and deposition. Available Via NPTEL lecture series. http://nptel.ac.in/courses/113106062/Lec26.pdf. Accessed 31 July 2017

  32. Vlachopoulou ME, Tsougeni K, Kontakis K, Vourdas N, Tserepi A, Gogolides E. Plasma etching technology for fabrication and surface modification of plastic microfluidic devices. http://www.ispc-conference.org/ispcproc/papers/678.pdf. Accessed 7 Aug 2017

  33. Plasma technology. Available via Diener plasma-surface technology. http://www.plasmasurfacetechnology.eu/media/Plasmatechnik_en_web.pdf. Accessed on 10 Aug 2017

  34. Van Zant P (2004) Microchip fabrication, 5th edn. McGraw-Hill, New York

    Google Scholar 

  35. Spencer EG, Schmidt PH (1971) Ion beam technique for device fabrication. J Vac Sci Technol 8(5):52–70

    Article  Google Scholar 

  36. Rasmussen KH (2014) Advanced dry etching studies for micro- and nano-systems. Dissertation, Technical University of Denmark

    Google Scholar 

  37. Panda S, Economou DJ (2000) Anisotropic etching of polymer films by high energy (~100 s of eV) oxygen atom neutral beams. J Vac Sci Technol A 19(2):398–404

    Article  Google Scholar 

  38. Yeo LY, Chang H-C, Chan PPY, Friend JR (2011) Microfluidic devices for bioapplications. Small 7:12–48

    Article  CAS  Google Scholar 

  39. Feng D, Nguyen AV (2017) Effect of contact angle and contact angle hysteresis on the floatability of spheres at the air-water interface. Adv Colloid Interf Sci. https://doi.org/10.1016/j.cis.2017.07.031

    Article  CAS  Google Scholar 

  40. Kim E, Xia YN, Whitesides GM (1995) Polymer microstructures formed by molding in capillaries. Nature 376:581–584. https://doi.org/10.1038/376581a0

    Article  CAS  Google Scholar 

  41. Shaw JEA (1993) Capillary fill encapsulation of ISFETs. Sensors Actuators A Phys 37–38:74–76. https://doi.org/10.1016/0924-4247(93)80015-9

    Article  Google Scholar 

  42. Kumar A, Biebuyck HA, Whitesides GM (1994) Patterning self-assembled monolayers: applications in materials science. Langmuir 10:1498–1511. https://doi.org/10.1021/la00017a030

    Article  CAS  Google Scholar 

  43. Kumar A, Whitesides GM (1993) Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol “ink” followed by chemical etching. Appl Phys Lett 63:2002–2004. https://doi.org/10.1063/1.110628

    Article  CAS  Google Scholar 

  44. Bride JA, Baskaran S, Taylor N, Halloran JW, Juan WH, Pang SW, O’Donnell M (1993) Photolithographic micromolding of ceramics using plasma etched polyimide patterns. Appl Phys Lett 63:3379–3381. https://doi.org/10.1063/1.110151

    Article  CAS  Google Scholar 

  45. Kim E, Xia Y, Whitesides GM (1996) Micromolding in capillaries: applications in materials science. J Am Chem Soc 118:5722–5731. https://doi.org/10.1021/ja960151v

    Article  CAS  Google Scholar 

  46. Filaments IP (2002) Defense technical information center compilation part notice title: micromolding in capillaries for the generation of molecularly imprinted polymer filaments and microstructures

    Google Scholar 

  47. Hull CW (1984) Apparatus for the production of three-dimensional objects by stereolithography

    Google Scholar 

  48. Ikuta K, Hirowatari K (1993) Real three dimensional micro fabrication using stereo lithography and metal molding. Proc IEEE Micro Electro Mech Syst IEEE:42–47

    Google Scholar 

  49. Xia C, Fang NX (2009) 3D microfabricated bioreactor with capillaries. Biomed Microdevices 11:1309–1315. https://doi.org/10.1007/s10544-009-9350-4

    Article  CAS  PubMed  Google Scholar 

  50. Ying Z, Chi-Wei L, Ashley TJ, Shu Y (2006) Replica molding of high-aspect-ratio polymeric nanopillar arrays with high fidelity. Langmuir 22(20):8595–8601

    Article  Google Scholar 

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Authors and Affiliations

  1. Department of Mechanical Engineering, Indian Institute of Technology Madras, Chennai, India

    Ashis Kumar Sen, Abhishek Raj, Utsab Banerjee & Sk Rameez Iqbal

Authors
  1. Ashis Kumar Sen
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  2. Abhishek Raj
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  3. Utsab Banerjee
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  4. Sk Rameez Iqbal
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Corresponding author

Correspondence to Ashis Kumar Sen .

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Editors and Affiliations

  1. Department of Chemistry, University of Wyoming, Laramie, WY, USA

    Debashis Dutta

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Sen, A.K., Raj, A., Banerjee, U., Iqbal, S.R. (2019). Soft Lithography, Molding, and Micromachining Techniques for Polymer Micro Devices. In: Dutta, D. (eds) Microfluidic Electrophoresis. Methods in Molecular Biology, vol 1906. Humana Press, New York, NY. https://doi.org/10.1007/978-1-4939-8964-5_2

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  • DOI: https://doi.org/10.1007/978-1-4939-8964-5_2

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  • Publisher Name: Humana Press, New York, NY

  • Print ISBN: 978-1-4939-8963-8

  • Online ISBN: 978-1-4939-8964-5

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