Abstract
The increase in VLSI complexity coupled with a reduction in IC layout geometries call for powerful analysis tools capable of performing very accurate measurements. In addition, since the users of such equipment should be mainly IC designers rather than EBT experts, ease of use is one of the primary concerns for an IC verification system. The emergence of EBT systems provides a way of meeting IC designer requirements, by offering a powerful measurement technique that is able to access internal nodes. On its own, the most sophisticated SEM is not enough to perform VLSI verification. A strict link with design data is mandatory to permit easy navigation within complex logic ICs.
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Battù, M., Garino, P., Melgara, M. (1993). System Integration. In: Thong, J.T.L. (eds) Electron Beam Testing Technology. Microdevices. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-1522-1_10
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DOI: https://doi.org/10.1007/978-1-4899-1522-1_10
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