Abstract
The microcantilever is a key precision mechatronic component of many technologies for characterization and manipulation of matter at the nanoscale, particularly in the atomic force microscope. When a cantilever is operated in a regime that requires the direct excitation and measurement of its resonance frequencies, appropriate instrumentation and control is crucial for high-performance operation. In this entry, we discuss integrated cantilever actuation and present the cantilever transfer function model and its properties. As a result of using these active cantilevers, the ability to control the quality factor in order to manipulate the cantilever tracking bandwidth is demonstrated.
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Ruppert, M.G., Moheimani, S.O.R. (2020). Dynamics and Control of Active Microcantilevers. In: Baillieul, J., Samad, T. (eds) Encyclopedia of Systems and Control. Springer, London. https://doi.org/10.1007/978-1-4471-5102-9_184-2
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DOI: https://doi.org/10.1007/978-1-4471-5102-9_184-2
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Chapter history
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Latest
Dynamics and Control of Active Microcantilevers- Published:
- 16 November 2019
DOI: https://doi.org/10.1007/978-1-4471-5102-9_184-2
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Original
Control for High-Speed Nanopositioning- Published:
- 13 February 2014
DOI: https://doi.org/10.1007/978-1-4471-5102-9_184-1