Abstract
Four square metal electrodes are prepared by electron beam evaporation system, respectively between the electrodes reverse insertion of a zener diode regulator tube by molecular beam epitaxy on (0001)—plane sapphire substrates growth β-Ga2O3 films, in gallium oxide thin film preparation four 50 um square area. The solar blind UV detector was prepared, measured the V-I curve, is connected with a zener diode by experiment data, it is shown that the solar blind ultraviolet detector of dark and light signals ratio reached nearly 50 times, its performance is not weaker than additional MSM fork electrode structure solar blind ultraviolet detector. Solar blind ultraviolet detector assisted by Zener diode structure has good performance, structure is more simple and greatly reduce the difficulty of fabrication process, compared with the traditional MSM fork to the electrode structure. The miniaturization of the device can be easily realized, is very suitable for developing large area solar blind ultraviolet detection array.
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References
R. Roy, V. G. Hill, E. F. Osborn, Polymorphism of Ga2O3 and the System Ga2O3-H2O[J]. J. Am. Chem. Soc. 1952, 74(3): 719-722.
M. B. Dale, D. Evan, K. Jim, et al. SiC flame sensors for gas turbine control systems[J]. Solid-State Electronics, 1998, 42(5): 766-760.
H. G. Rorbert, A. A. Paul, D. B. John. Ultraviolet scene simulation for missile approach warning system testing[C]. SPIE, 1997, 3084: 282.
Z. G. Ju, C. X. Shan, D.Y. Jiang, et al. MgxZn1-xO-based photodetectors covering the whole solar-blind spectrum range[J]. Applied Physics Letters, 2008, 93(17): 173505.
H. Hosono. Recent progress in transparent oxide semiconductors: Materials and device application[J]. Thin Solid Films, 2007, 515: 6000-6014.
Rikiya, Suzuki,Shinji, Nakagomi,NaokiArai,et al.Enhancement of responsivity in solar-blind β-Ga2O3 photodiodes with a Au Schottky contact fabricated on single crystal substrates by anneling[J]. Applied Physics Letters, 2009, 94, 222102.
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Xia, Y., Liu, Xz. (2016). Study on the New Structure of the Solar Blind Ultraviolet Detector. In: Qi, E., Shen, J., Dou, R. (eds) Proceedings of the 22nd International Conference on Industrial Engineering and Engineering Management 2015. Atlantis Press, Paris. https://doi.org/10.2991/978-94-6239-180-2_47
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DOI: https://doi.org/10.2991/978-94-6239-180-2_47
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