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Mathematical Models with Singularities pp 15–20Cite as

An Electrostatically Actuated Micro-electro-mechanical System

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Part of the book series: Atlantis Briefs in Differential Equations ((ABDE,volume 1))

Abstract

Micro-electro-mechanical systems (MEMS) are miniaturized devices made up of mechanical and electromechanical elements. In this chapter, we consider the existence and stability of periodic oscillations of an idealized mass-spring model of MEMS that has become canonical in the related literature.

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Authors and Affiliations

  1. Department of Applied Mathematics, University of Granada, Granada, Spain

    Pedro J. Torres

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  1. Pedro J. Torres
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Correspondence to Pedro J. Torres .

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Torres, P.J. (2015). An Electrostatically Actuated Micro-electro-mechanical System. In: Mathematical Models with Singularities. Atlantis Briefs in Differential Equations, vol 1. Atlantis Press, Paris. https://doi.org/10.2991/978-94-6239-106-2_2

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