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Force and vision feedback for robotic manipulation of the microworld

  • Chapter 10 Haptics
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Experimental Robotics VI

Part of the book series: Lecture Notes in Control and Information Sciences ((LNCIS,volume 250))

Abstract

Several emerging research areas related to microscale phenomenon, such as micromechatronics and biological cell manipulation, have the potential to significantly impact our society. Current manufacturing techniques, however, are incapable of automatically handling objects at these scales. The lack of manufacturing techniques for manipulating micron sized objects presents a technology barrier to the eventual commercial success of these fields. To overcome this technology barrier, new strategies in robotic control and robotic micromanipulation must be developed. These strategies which will enable the development of automatic micropart handling capabilities must address the following two issues: (1) extreme high relative positioning accuracy must be achieved, and (2) the vastly different microphysics that govern part interactions at micron scales must be compensated. In this paper, we present our work in visually servoed micropositioning and force sensor development for characterizing the mechanics of micromanipulation and controlling microforces throughout microassembly tasks.

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References

  1. T.R. Albrecht, S. Akamine, T.E. Carver, and C.F. Quate, “Microfabrication of cantilever styli for the atomic force microscope,” J. Vac. Sci. Technol. A 8(4), 3386–3396, 1990.

    Google Scholar 

  2. F. Arai, D. Ando, T. Fukuda, “Micro Manipulation Based on Micro Physics-Strategy Based on Attractive Force Reduction and Stress Measurement,” Proc. 1995 IEEE/RSJ Int. Conf. on Intelligent Robots and Sys. (IROS95), 2:236–241, Pittsburgh, August 5–9, 1995.

    Article  Google Scholar 

  3. S.K. Ault and M.E. Lowry, “Automated Packaging: A Cure for Market Growing Pains,” Photonics Spectra, pp. 120–124, September, 1996.

    Google Scholar 

  4. G. L. Cloud, Optical Methods of Engineering Analysis, New York: Cambridge University Press, Part VI & VII, 1995.

    Google Scholar 

  5. R.S. Fearing, “Survey of Sticking Effects for Micro Parts Handling,” Proc. 1995 IEEE/RSJ Int. Conf. on Intelligent Robots and Sys. (IROS95), 2:212–217, Pittsburgh, August 5–9, 1995.

    Google Scholar 

  6. M. Fu, B. R. Barmish, “Adaptive stabilization of linear systems via switching controls”, IEEE Trans. on Automatic Control; p.1097–1103, Dec. 1986.

    Google Scholar 

  7. T.R. Hicks and P.D. Atherton, The NanoPositioning Book, Queensgate Instruments Ltd., 1997.

    Google Scholar 

  8. N. Kato, I. Suzuki, “Force-balancing force sensor with an optical lever”, Rev. Sci. Instrum. pp. 5532–36, 66(12), Dec. 1995.

    Article  Google Scholar 

  9. B. Nelson, N.P. Papanikolopoulos, and P.K. Khosla, “Visual servoing for robotic assembly,” Visual Servoing—Real-Time Control of Robot Manipulators Based on Visual Sensory Feedback. ed. K. Hashimoto. River Edge, NJ:World Scientific Publishing Co. Pte. Ltd. pp. 139–164, 1993.

    Google Scholar 

  10. N.P. Papanikolopoulos, Nelson, B. and Khosla, P.K., “Full 3-d tracking using the controlled active vision paradigm,” Proc. 1992 IEEE Int. Symp. on Intelligent Control (ISIC-92), pp. 267–274, 1992.

    Google Scholar 

  11. S. Ralis, B. Vikramaditya, and B.J. Nelson, “Visual Servoing Frameworks for Microassembly of Hybrid MEMS,” SPIE Vol. 3519 Microrobotics and Micromanipulation, pp. 70–79, 1998.

    Google Scholar 

  12. B. Vikramaditya and B.J. Nelson, “Visually Guided Microassembly Using Optical Microscopes and Active Vision Techniques,” Proc. 1997 IEEE Int. Conf. on Robotics and Automation, pp. 3172–3177, Albuquerque, April 21–27, 1997.

    Google Scholar 

  13. Y. Zhou, B.J. Nelson, and B. Vikramaditya, “Fusing Force and Vision Feedback for Micromanipulation,” Proc. 1998 IEEE Int. Conf. on Robotics and Automation, Leuven, Belgium, May, 1998.

    Google Scholar 

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Author information

Authors and Affiliations

  1. Steve Ralis is with Electroglas Inspection Products, Inc., Corvallis, Oregon

    Steve Ralis

  2. Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota, USA

    Bradley J. Nelson, Steve Ralis, Yu Zhou & Barmeshwar Vikramaditya

Authors
  1. Bradley J. Nelson
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  2. Steve Ralis
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  3. Yu Zhou
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  4. Barmeshwar Vikramaditya
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Corresponding author

Correspondence to Bradley J. Nelson .

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© 2000 Springer-Verlag London Limited

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Nelson, B.J., Ralis, S., Zhou, Y., Vikramaditya, B. (2000). Force and vision feedback for robotic manipulation of the microworld. In: Experimental Robotics VI. Lecture Notes in Control and Information Sciences, vol 250. Springer, London. https://doi.org/10.1007/BFb0119421

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  • DOI: https://doi.org/10.1007/BFb0119421

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  • Publisher Name: Springer, London

  • Print ISBN: 978-1-85233-210-5

  • Online ISBN: 978-1-84628-541-7

  • eBook Packages: Springer Book Archive

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