Migration of radicals in resist polymers — an example of microscopic transport processes
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Recent activities of the author in the field of decay reactions of radicals in polymers are described. An advance in the interpretation of the thermostimulated radical processes and reactions in solid polymers has been achieved by the use of a broad distribution of the activation energy which allows correlation with other thermally stimulated processes in the polymers.
Key wordsMigration of radicals resist p olymers thermostimulated processes activation energy distribution
- 2.Wünsche P, Müller S, Lorkowski H-J, received for publication in Journal of Polymer Science A1Google Scholar