Abstract
The surface oxidation of semiconductors stimulated by laser irradiation will be presented considering both laser induced deposition of oxide films and laser induced oxidation of an irradiated substrate. Some emphasis will be given to oxidation processes occurring in surface melted layers produced by intense laser pulses. In particular, possible mechanisms of ultrafast oxide growth will be presented summarizing both what is understood in transient laser processing and the still unresolved questions.
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Y. S. Liu, S. W. Chiang and F. Bacon, Appl. Phys. Lett. 38, 1005 (1981)
K. Hoh, H. Koyama, K. Uda and Y. Miure, Jap. J. Appl. Phys. 19, L375 (1980)
D. J. Ehrlich and J. Y. Tsao, J. Vac. Sci. Technol. B1, 969 (1983)
P. K. Boyer, W. H. Roche, W. H. Ritchie, R. J. Collins, Appl. Phys. Lett. 40, 716 (1982)
S. Szikora, W. Krauter and D. Bauerle, Mat. Lett. 2, 263 (1984)
B. F. Deal and A. S. Grove, J. Appl. Phys. 36, 3770 (1965)
J. Blanc, Appl. Phys. Lett. 33, 424 (1978)
W. A. Tiller, J. Electrochem. Soc. 127, 618 (1980)
S. A. Schaefer and S. A. Lyon, J. Vac. Sci. Technol. 19, 429 (1981)
I. W. Boyd and J. I. B. Wilson, Appl. Phys. Lett. 42, 162 (1982)
E. M. Young and W. A. Tiller, Appl. Phys. Lett. 42, 63 (1983)
S. A. Schaefer and S. A. Lyon, J. Vac. Sci. Technol. 21, 422 (1982)
W. L. Brown, “Laser and Electron Beam Processing of Materials” ed. by C. W. White and P. S. Percy (Academic Press, N. Y. 1980), p. 20
L. D. Laude, “Laser Processing and Diagnostics”, ed. by D. Bauerle, (Springer 1984), p. 355
T. E. Orlowski and H. Richter, Appl. Phys. Lett. 45, 241 (1984)
G. G. Bentini, M. Berti, C. Cohen, A. V. Drigo, E. Jannitti, D. Pribat and J. Siejka, Journal de Physique C1 43, 229 (1982)
J. F. M. Westendorp, Z. L. Wang and F. W. Saris, “Laser and Electron Beam Interaction with Solids”, ed. by B. R. Appleton and G. K. Celler (Elsevier 1982), p. 255
C. Cohen, J. Siejka, M. Berti, A. V. Drigo, G. G. Bentini and D. Bribat J. Appl. Phys. 55, 4081 (1984)
G. G. Bentini, M. Berti, E. Jannitti, C. Cohen and J. Siejka, “Laser Chemical Processing of Semiconductor Devices”, ed. by F. A. Houle, T. F. Deutsch and R. M. Osgood, Jr. (MRS Pittsburg 1984), p. 126
W. Kaier and J. Bresling, J. Appl. Phys. 29, 1292 (1958)
C. Wagner, J. Appl. Phys. 29, 1296 (1958)
J. C. Baker and J. W. Cahn, “Solidification”, ed. by Am. Soc. Metals (1971) p. 26
V. J. Fratello, J. F. Hays and D. Turnbull, J. Appl. Phys. 49, 3906 (1978).
Y. S. Liu, S. W. Chiang and W. Katz, “Laser and Electron Beam Interaction with Solids”, ed. by B. R. Appleton and G. K. Celler (Elsevier 1982), p. 249
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© 1985 Friedr. Vieweg & Sohn Verlagsgesellschaft mbH
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Bentini, G.G. (1985). Surface oxidation induced by laser irradiation in semiconductors. In: Grosse, P. (eds) Festkörperprobleme 25. Advances in Solid State Physics, vol 25. Springer, Berlin, Heidelberg. https://doi.org/10.1007/BFb0108138
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DOI: https://doi.org/10.1007/BFb0108138
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