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Hydrogen and oxygen bonding on silicon surfaces

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Festkörperprobleme 23

Part of the book series: Advances in Solid State Physics ((ASSP,volume 23))

Abstract

Vibrational spectroscopy is an especially suited tool to investigate bonding configurations of chemisorbed species on solid surfaces. Here we employ high resolution electron energy loss spectroscopy to study the bonding structure of hydrogen, water and oxygen on Si(100) and Si(111) surfaces. Atomic hydrogen does not only saturate dangling bonds of Si surface atoms but also breaks Si−Si bonds to form SiH2 units which are thermally less stable than SiH units. Water chemisorbs dissociatively by forming SiOH and SiH complexes. At elevated temperatures the hydroxyl groups dissociate further and oxygen bonds in a bridge configuration between Si surface atoms. This energetically favourable bonding structure is also observed after oxygen adsorption at elevated temperatures. Only for low temperature adsorption and low oxygen coverage a peroxy radical with one oxygen atom bonding to one silicon surface atom occurs as a precursor state for bridge bonded oxygen.

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References

  1. H. Ibach and D. L. Mills, Electron Energy Loss Spectroscopy and Surface Vibrations, Academic Press, New York 1982.

    Google Scholar 

  2. American Institute of Physics Handbook, 3rd edition, McGraw-Hill, New York, 1972.

    Google Scholar 

  3. D. J. Chadi, Phys. Rev. Lett. 43, 43 (1979).

    Article  ADS  Google Scholar 

  4. P. Koke and W. Mönch, Solid State Commun. 36, 1007 (1980); W. Mönch, P. Koke and S. Krueger, J. Vac. Sci. Technol. 19, 313 (1981).

    Article  ADS  Google Scholar 

  5. H. Wagner, R. Butz, U. Backes and D. Bruchmann, Solid State Commun. 38, 1155 (1981).

    Article  ADS  Google Scholar 

  6. H. Ibach, H. Wagner and D. Bruchmann, Solid State Commun. 42, 457 (1982).

    Article  ADS  Google Scholar 

  7. H. Ibach, H. D. Bruchmann and H. Wagner, Appl. Phys. A29, 113 (1982).

    Article  Google Scholar 

  8. T. Sakurai and H. D. Hagstrum, Phys. Rev. B14, 1593 (1976).

    Article  ADS  Google Scholar 

  9. T. Sakurai and H. D. Hagstrum, Phys. Rev. B12, 5349 (1975).

    Article  ADS  Google Scholar 

  10. K. C. Pandey, T. Sakurai and H. D. Hagstrum, Phys. Rev. Lett. 35, 1728 (1975).

    Article  ADS  Google Scholar 

  11. R. Butz, R. Memeo and H. Wagner, Phys. Rev. B25, 4327 (1982).

    Article  ADS  Google Scholar 

  12. G. Schulze and M. Henzler in: Proc. 14th Intern. Conf. on Solid Surfaces and 3rd European Conf. on Surface Science, Cannes, Vol. II, p. 967 (1980).

    Google Scholar 

  13. A. P. Webb and S. Veprek, Chem. Phys. Lett. 62, 173 (1978).

    Article  ADS  Google Scholar 

  14. F. Meyer, Surf. Sci. 27, 107 (1971).

    Article  ADS  Google Scholar 

  15. K. Fujiwara, Surf. Sci. 108, 124 (1981); J. Chem. Phys. 75, 5172 (1981).

    Article  ADS  Google Scholar 

  16. S. Ciraci and H. Wagner, Phys. Rev. B27, 5180 (1983).

    Article  ADS  Google Scholar 

  17. W. A. Goddard III, A. Redondo and T. C. McGill, Solid State Commun. 18, 981 (1976).

    Article  ADS  Google Scholar 

  18. M. Green and A. Liberman, J. Phys. Chem. Solids 23, 1407 (1962).

    Article  ADS  Google Scholar 

  19. H. Ibach, K. Horn, R. Dorn and H. Lüth, Surf. Sci. 38, 433 (1973).

    Article  ADS  Google Scholar 

  20. M. Green and K. H. Maxwell, J. Phys. Chem. Solids 13, 145 (1960).

    Article  ADS  Google Scholar 

  21. F. M. Meyer and J. J. Vrakking, Surf. Sci. 38, 433 (1973).

    Article  Google Scholar 

  22. R. Ludeke and A. Koma, Phys. Rev. Lett. 34, 1170 (1975).

    Article  ADS  Google Scholar 

  23. M. Chen, Inder P. Batra and R. C. Brundle, J. Vac. Sci. Technol. 16, 1216 (1979).

    Article  ADS  Google Scholar 

  24. C. Y. Su, P. R. Skeath, I. Lindau and W. E. Spicer, J. Vac. Sci. Technol. 19, 481 (1981).

    Article  ADS  Google Scholar 

  25. M. T. Yin and M. L. Cohen, Phys. Rev. B24, 2303 (1981).

    Article  ADS  Google Scholar 

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P. Grosse

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© 1983 Friedr. Vieweg & Sohn Verlagsgesellschaft mbH

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Wagner, H., Ibach, H. (1983). Hydrogen and oxygen bonding on silicon surfaces. In: Grosse, P. (eds) Festkörperprobleme 23. Advances in Solid State Physics, vol 23. Springer, Berlin, Heidelberg. https://doi.org/10.1007/BFb0107974

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  • DOI: https://doi.org/10.1007/BFb0107974

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  • Print ISBN: 978-3-528-08029-7

  • Online ISBN: 978-3-540-75372-8

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