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The microstructure of technologically important silicon surfaces

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Festkörperprobleme 27

Part of the book series: Advances in Solid State Physics ((ASSP,volume 27))

Abstract

The increasing requirements of modern silicon technology ask for structural analysis of non-periodic features down to atomic resolution. New instrumental developments in surface physics provide such informations both with imaging (TEM) and differaction (LEED) techniques. The atomic steps at the Si/SiO2 interface, which are produced during oxidation, are studied with respect to vertical and lateral distribution and to correlation with device performance (like interface state density and mobility). Also for epitaxial growth atomically smooth interfaces are required for best electrical and optical performance. LEED results show the two-dimensional nucleation and the layer-by-layer growth in detail.

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References

  1. C. Davisson and L. H. Germer, Phys. Rev. 30, 705 (1927)

    Article  ADS  Google Scholar 

  2. O. L. Krivanek and J. H. Mazur, Appl. Phys. Lett. 37, 392 (1980)

    Article  ADS  Google Scholar 

  3. G. Binnig and H. Rohrer, Surf. Sci. 152/153, 17 (1985)

    Article  ADS  Google Scholar 

  4. M. Henzler, Appl. Surf. Sci. 11/12, 450 (1982)

    Article  ADS  Google Scholar 

  5. M. G. Lagally, Appl. Surf. Sci. 13, 260 (1982)

    Article  ADS  Google Scholar 

  6. P. K. Larsen, B. A. Joyce, and P. J. Dobson in: Springer Series in Surf. Sci. 3, ed. by F. Nizzoli, K. H. Rieder, R. F. Willis Springer, Berlin 1985

    Google Scholar 

  7. J. M. van Howe, C. S. Lent, P. R. Pukite, and P. I. Cohen, J. Vac. Sci. Techn. B1, 741 (1983)

    Article  Google Scholar 

  8. J. M. van Howe, C. S. Lent, P. R. Pukite, and P. I. Cohen, I. Vac. Sci. Techn. A1, 546 (1983)

    ADS  Google Scholar 

  9. J. M. van Howe, C. S. Lent, P. R. Pukite, and P. I. Cohen, I. Vac. Sci. Techn. B2, 243 (1984)

    Article  Google Scholar 

  10. J. M. van Howe, C. S. Lent, P. R. Pukite, and P. I. Cohen, I. Vac. Sci. Techn. B3, 563 (1985)

    Article  Google Scholar 

  11. S. M. Goodnick, R. G. Gann, J. R. Sites, D. K. Ferry, C. W. Wilmsen, D. Fathy, and O. L. Krivanek, J. Vac. Sci. Techn. B1, 803 (1983)

    Article  Google Scholar 

  12. S. M. Goodnick, D. K. Ferry, C. W. Wilmsen, Z. Lilienthal, D. Fathy, and O. L. Krivanek, Phys. Rev. B32, 8171 (1985)

    Article  ADS  Google Scholar 

  13. T. Ando, A. B. Fowler, and F. Stern, Rev. Mod. Phys. 54, 437 (1982)

    Article  ADS  Google Scholar 

  14. F. J. Grunthauer, P. J. Grunthauer, M. H. Hecht, and D. Lawson in: Insulating Films on Semiconductors, ed. by J. J. Simonne and J. Buxo (North Holland, Amsterdam 1986)

    Google Scholar 

  15. P. O. Hahn and M. Henzler, J. Appl. Phys. 54, 6492 (1983)

    Article  ADS  Google Scholar 

  16. P. O. Hahn and M. Henzler, J. Vac. Sci. Techn. A2, 574 (1984)

    Article  ADS  Google Scholar 

  17. I. K. Robinson, priv. comm.

    Google Scholar 

  18. R. J. Behm and P. O. Hahn, priv. comm.

    Google Scholar 

  19. C. d'Anterroches, J. Micr. Specr. El. 9, 147 (1984)

    Google Scholar 

  20. G. Hollinger and F. J. Himpsel, Phys. Rev. B28, 3651 (1983)

    Article  ADS  Google Scholar 

  21. G. Hollinger and F. J. Himpsel, J. Vac. Sci. Techn. A1, 640 (1983)

    Article  ADS  Google Scholar 

  22. W. Braun and H. Kuhlenbeck, Surf. Sci. 180, 279 (1987)

    Article  ADS  Google Scholar 

  23. M. Henzler and P. Marienhoff, J. Vac. Sci. Techn. B2, 346 (1984)

    Article  Google Scholar 

  24. M. Henzler in: INFOS, ed. by J. J. Simonne and J. Buxo (North Holland, Amsterdam 1986)

    Google Scholar 

  25. M. Henzler in Solid State Devices 1986 (Inst. Phys. Conf. Series 82, London 1986)

    Google Scholar 

  26. P. O. Hahn, S. Yokohama, and M. Henzler, Surf. Sci. 142, 545 (1984)

    Article  ADS  Google Scholar 

  27. M. G. Lagally and J. A. Martin. Rev. Sci. Instr. 54, 1273 (1983)

    Article  ADS  Google Scholar 

  28. M. Henzler, Surf. Sci. 132, 82 (1983)

    Article  ADS  Google Scholar 

  29. J. Wollschläger, Diplomarbeit, Hannover 1986

    Google Scholar 

  30. J. A. Martin, C. A. Aumann, and M. G. Lagally, J. Vac. Sci. Techn. in press

    Google Scholar 

  31. A. Gold, Phys. Rev. Lett. 54, 1079 (1985)

    Article  ADS  Google Scholar 

  32. A. Gold and W. Götze, Phys. Rev. B33, 2495 (1986)

    Article  ADS  Google Scholar 

  33. N. Osakabe, Y. Tanishiro, K. Yagi, G. Honjo, and K. Takayanagi, Surf. Sci. 97, 393 (1980)

    Article  ADS  Google Scholar 

  34. N. Osakabe, Y. Tanishiro, K. Yagi, G. Honjo, and K. Takayanagi, Surf. Sci. 102, 424 (1980)

    Google Scholar 

  35. N. Osakabe, Y. Tanishiro, K. Yagi, G. Honjo, and K. Takayanagi, Surf. Sci. 104, 527 (1981)

    Article  Google Scholar 

  36. W. Telieps and E. G. Bauer, priv. comm.

    Google Scholar 

  37. K. D. Gronwald and M. Henzler, Surf. Sci. 117, 180 (1982)

    Article  ADS  Google Scholar 

  38. T. Sakamoto, N. J. Kawai, T. Nakagawa, K. Ohta, and T. Kojima, Surf. Sci. 174, 651 (1986)

    Article  ADS  Google Scholar 

  39. P. J. Dobson, J. H. Neave, and B. A. Joyce, Surf. Sci. 119, L339 (1982)

    Article  ADS  Google Scholar 

  40. M. Horn and M. Henzler, J. Cryst. Gr. 81, 428 (1987)

    Article  ADS  Google Scholar 

  41. R. Altsinger, Diplomarbeit, Hannover 1986

    Google Scholar 

  42. U. Gotter, Diplomarbeit, Hannover 1987

    Google Scholar 

  43. H. J. Gossmann and L. E. Feldmann, Appl. Phys. A38, 171 (1985)

    Article  ADS  Google Scholar 

  44. E. Kasper, this volume

    Google Scholar 

  45. R. T. Tung, J. M. Gibson, and J. M. Poate, Phys. Rev. Lett. 50, 429 (1983)

    Article  ADS  Google Scholar 

  46. J. C. Hensel, R. T. Tung, J. M. Poate, and F. C. Unterwald, Surf. Sci. 142, 37 (1984)

    Article  ADS  Google Scholar 

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Authors and Affiliations

  1. Institut für Festkörperphysik, Universität Hannover, D-3000, Hannover, Federal Republic of Germany

    Martin Henzler

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  1. Martin Henzler
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P. Grosse

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© 1987 Friedr. Vieweg & Sohn Verlagsgesellschaft mbH

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Henzler, M. (1987). The microstructure of technologically important silicon surfaces. In: Grosse, P. (eds) Festkörperprobleme 27. Advances in Solid State Physics, vol 27. Springer, Berlin, Heidelberg. https://doi.org/10.1007/BFb0107921

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  • DOI: https://doi.org/10.1007/BFb0107921

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  • Print ISBN: 978-3-528-08033-4

  • Online ISBN: 978-3-540-75356-8

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