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Modern silicon technology

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Festkörperprobleme 15

Part of the book series: Advances in Solid State Physics ((ASSP,volume 15))

Abstract

Initially, the milestones in material and device technology based on silicon are used to explain the various trends in this most important sector of electronics. Emphasis is put on the state of the art in large-scale operating hyperpure polycrystalline rods as well as float-zoned and crucible-pulled single crystals. Further production stages ending with polished slices and epitaxial layers also are considered in this survey. Economical aspects are discussed finally in the light of fruitful interaction between device manufacturers and materials producers.

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Authors and Affiliations

  1. Wacker-Chemitronic, Gesellschaft für Elektronik-Grundstoffe mbH., 8263, Burghausen/Obb, Germany

    Hans Herrmann, Heinz Herzer & Erhard Sirtl

Authors
  1. Hans Herrmann
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  2. Heinz Herzer
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  3. Erhard Sirtl
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H. J. Queisser

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© 1975 Friedr. Vieweg & Sohn Verlagsgesellschaft mbH

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Herrmann, H., Herzer, H., Sirtl, E. (1975). Modern silicon technology. In: Queisser, H.J. (eds) Festkörperprobleme 15. Advances in Solid State Physics, vol 15. Springer, Berlin, Heidelberg. https://doi.org/10.1007/BFb0107382

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  • DOI: https://doi.org/10.1007/BFb0107382

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  • Print ISBN: 978-3-528-08021-1

  • Online ISBN: 978-3-540-75347-6

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