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Modern silicon technology

  • Hans Herrmann
  • Heinz Herzer
  • Erhard Sirtl
Chapter
Part of the Advances in Solid State Physics book series (ASSP, volume 15)

Abstract

Initially, the milestones in material and device technology based on silicon are used to explain the various trends in this most important sector of electronics. Emphasis is put on the state of the art in large-scale operating hyperpure polycrystalline rods as well as float-zoned and crucible-pulled single crystals. Further production stages ending with polished slices and epitaxial layers also are considered in this survey. Economical aspects are discussed finally in the light of fruitful interaction between device manufacturers and materials producers.

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Copyright information

© Friedr. Vieweg & Sohn Verlagsgesellschaft mbH 1975

Authors and Affiliations

  • Hans Herrmann
    • 1
  • Heinz Herzer
    • 1
  • Erhard Sirtl
    • 1
  1. 1.Wacker-Chemitronic, Gesellschaft für Elektronik-Grundstoffe mbH.Burghausen/ObbGermany

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