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Technology and fabrication of quantum devices: Submicron lithography and etching techniques

  • Sybrand Radelaar
Conference paper
Part of the Lecture Notes in Physics book series (LNP, volume 419)

Keywords

Proximity Effect Electron Beam Lithography Pattern Transfer Optical Lithography Selective Deposition 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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Copyright information

© Springer-Verlag 1993

Authors and Affiliations

  • Sybrand Radelaar
    • 1
  1. 1.DIMES, (Delft Institute for Micro-Electronics and Submicrontechnology)DelftThe Netherlands

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