Abstract
Thrust aerostatic bearing with vacuum pre-load (VPL pad) is used in high-precision application. In some cases, performance of bearing not only needs to be optimal, but also needs good stability. In this paper, a parameter called stiffness volatility is defined to represent stability of performance of VPL pad under operating condition. It shows that parameters such as vacuity, area ratio and positive pressure distinctly affect stiffness volatility of VPL pad. There is significant interaction between those effect factors. Through adjusting parameter combination, optimized performance of VPL pad under operating condition is obtained.
This project is supported by Laboratory of Ultra Precision Manufacturing Technology, CAEP (No. K1065) and Science Challenging Program of CAEP (No. JCKY2016212A506-0106).
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- p s :
-
supply pressure
- p v :
-
vacuity of the VPL pad
- r a , r b , r c , r d :
-
supporting area radius
- r ab , r cd :
-
orifice distribution radius
- \( \xi_{s} \) :
-
ratio of the vacuum area
- h :
-
air film thickness
- d 0 :
-
orifice diameter
- n in ,n out :
-
orifice number
- K z :
-
stiffness at zero-load state
- K r :
-
stiffness at rated-load state
- K f :
-
stiffness at full-load state
- \( \bar{K} \) :
-
average stiffness
- S v :
-
stiffness volatility
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Li, M., Hu, Q., Liu, P., Huang, M. (2020). Analysis and Optimization of Performance Under Operating Condition of Thrust Aerostatic Bearing with Vacuum Pre-load. In: Tan, J. (eds) Advances in Mechanical Design. ICMD 2019. Mechanisms and Machine Science, vol 77. Springer, Singapore. https://doi.org/10.1007/978-981-32-9941-2_25
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DOI: https://doi.org/10.1007/978-981-32-9941-2_25
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