Abstract
With the rapid development of semiconductor, vacuum coating and other industries, integrated vacuum system is widely used. More and more complex working environment puts forward higher requirements for vacuum pipelines and vacuum equipment. Based on the practical engineering background, the thermal-fluid-solid coupling analysis of the front-stage water-cooling pipeline of a vacuum equipment is carried out in this paper. In this paper, the key parameters of fluid-solid coupling heat transfer are theoretically calculated by using the front stage water-cooled vacuum pipeline of molecular pump as the analysis model. The commercial finite element analysis software ANSYS was used to analyze the thermal-fluid-solid coupling of water-cooled vacuum pipeline. The flow field, temperature field and stress field of the pipeline and fluid field were obtained when the requirement was met. The simulation results provide theoretical support and data reference for practical engineering projects.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Chida, K.: Study on conjugate heat transfer by vectorial dimensional analysis. J. Heat Mass Transf. 19, 453–460 (1976)
Ai-Zaharnah, I.T., Yilbas, B.S., Hashmi, M.S.J.: Conjugate heat transfer in fully developed laminar pipe flow and thermally induced stresses. Comput. Method Appl. Mech. Eng. 190, 1091–1104 (2000)
Ghariban, N., Haji-Sheikh, A., You, S.M.: Pressure drop and heat transfer in turbulent duct flow: a two-parameter variational method. J. Heat Transf. 117, 289–295 (1995)
Liu, C., Zhang, Y.: Analysis and optimization of pipeline elbow erosion based on Thermal-Fluid-Solid coupling. Energy Environ. Prot. 40(1), 51–56 (2018)
Zhang, J., Huang, C.: Numerical simulation of coupled heat transfer and thermal stress distribution in square tubes. In: First Academic Conference on Hypersonic Technology, CSTAM-2008-0032, pp. 169–174 (2008)
Li, Y., Zhu, B., Liu, J., Fang, J.: Single fluid method for fluid-solid coupled heat transfer in pipelines. Ship Sci. Technol. 37(9), 110–115 (2015)
Liu, X.: Study on stress and vibration characteristics of heat exchanger tube bundles based on thermal-fluid-solid coupling. Master’s thesis, Northeast University (2018)
Qiu, Z.: Research on flow and fluid-solid coupling heat transfer in cooling water jacket of gasoline engine. Master’s thesis, Yanshan University (2018)
Versteeg, H.K., Malalasekera, W.: An Introduction to Computational Fluid Dynamics. Pearson Education Limited, London (1995)
Yang, S., Tao, W.: Heat Transfer, 4th edn. Higher Education Press, Beijing (2007). Accessed 01 Sept 2007
https://janaf.nist.gov/. Accessed May 2019
GB/T 20801.2-2006: Pressure Pipeline Specification Industrial Pipeline Part II: Materials (2006)
Acknowledgments
The authors would like to offer their gratitude to the CBVAC Projects (No. 2017ZX02201006) for providing the research funding and technical support by chief engineer Yi Jin and mechanical engineer Rui Cheng.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2020 Science Press
About this paper
Cite this paper
Zhao, D., Jiang, D., Yu, J., Wang, C. (2020). Thermal-Fluid-Solid Coupling Analysis of Water-Cooled Vacuum Pipeline. In: Duan, B., Umeda, K., Hwang, W. (eds) Proceedings of the Seventh Asia International Symposium on Mechatronics. Lecture Notes in Electrical Engineering, vol 588. Springer, Singapore. https://doi.org/10.1007/978-981-32-9437-0_39
Download citation
DOI: https://doi.org/10.1007/978-981-32-9437-0_39
Published:
Publisher Name: Springer, Singapore
Print ISBN: 978-981-32-9436-3
Online ISBN: 978-981-32-9437-0
eBook Packages: Intelligent Technologies and RoboticsIntelligent Technologies and Robotics (R0)