Abstract
In this work, ultra-thin TiO2 nanostructured films, synthesized by atomic layer deposition method (ALD), were integrated in sensor structures. The effect of post-growth annealing and thickness of TiO2 samples on UV and hydrogen gas sensing properties is investigated. An increase in current value of more than one order of magnitude (I UVON /I UVOFF ~38) has been detected under exposure to UV light (365 nm) of sample with 45 nm thickness and annealed in furnace at 650°C for 2 hours. Samples with 15 nm thickness and rapid thermal annealed at 450°C for 3 min, have shown hydrogen gas response ( 3.75).
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© 2016 Springer Science+Business Media Singapore
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Postica, V. et al. (2016). Sensing Properties of Ultra-Thin TiO2 Nanostructured Films Based Sensors. In: Sontea, V., Tiginyanu, I. (eds) 3rd International Conference on Nanotechnologies and Biomedical Engineering. IFMBE Proceedings, vol 55. Springer, Singapore. https://doi.org/10.1007/978-981-287-736-9_36
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DOI: https://doi.org/10.1007/978-981-287-736-9_36
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Publisher Name: Springer, Singapore
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Online ISBN: 978-981-287-736-9
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