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Modeling and Scheduling for the Clean Operation of Semiconductor Manufacturing

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Artificial Intelligence Algorithms and Applications (ISICA 2019)

Part of the book series: Communications in Computer and Information Science ((CCIS,volume 1205))

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Abstract

Motivated by the clean operation in the semiconductor manufacturing, this paper model it as a non-identical parallel machine scheduling problem with machine flexible periodical maintenance, in which the machines must to be stopped for changing cleaning agent periodically to avoid that too much the dirt residue in the machine damages the wafer. The objective is to minimize the makespan. For the problem, we proposed a mixed integer programming (MIP) model to find all optimal solutions for small problems, additionally, an efficient particle swarm optimization (PSO) algorithm is develop to obtain near-optimal solutions. Computational results show that the proposed PSO algorithm is quite successful on both solution accuracy and efficiency to solve the considered problem.

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References

  1. Ying, K.-C., Lu, C.-C., Chen, J.-C.: Exact algorithms for single-machine scheduling problems with a variable maintenance. Comput. Ind. Eng. 98, 427–433 (2016)

    Article  Google Scholar 

  2. Luo, W., Cheng, T.C.E., Ji, M.: Single-machine scheduling with a variable maintenance activity. Comput. Ind. Eng. 79, 168–174 (2015)

    Article  Google Scholar 

  3. Su, L.-H., Wang, H.-M.: Minimizing total absolute deviation of job completion times on a singel machine with cleaning activities. Comput. Ind. Eng. 103, 242–249 (2017)

    Article  Google Scholar 

  4. Su, L.H., Hsiao, M.-C., Zhou, H., Chou, F.-D.: Minimizing the number of tardy jobs on unrelated parallel machines with dirt consideration. J. Ind. Prod. Eng. 35, 383–393 (2018)

    Google Scholar 

  5. Pinedo, M.: Scheduling: Theory, Algorithms, and Systems. Prentice-Hall, New Jersey (2002)

    MATH  Google Scholar 

  6. Chen, J.S.: Scheduling of nonresumable jobs and flexible maintenance activities on a single machine to minimize makespan. Eur. J. Oper. Res. 190, 90–102 (2008)

    Article  MathSciNet  Google Scholar 

  7. Schmidt, G.: Scheduling with limited machine availability”. Eur. J. Oper. Res. 121, 1–15 (2000)

    Article  MathSciNet  Google Scholar 

  8. Ma, Y., Chu, C., Zuo, C.: A survey of scheduling with deterministic machine availability constraints. Comput. Ind. Eng. 58, 199–211 (2010)

    Article  Google Scholar 

  9. Qi, X., Chen, T., Tu, F.: Scheduling the maintenance on a single machine. J. Oper. Res. Soc. 50, 1071–1078 (1999)

    Article  Google Scholar 

  10. Cui, W.W., Lu, Z.: Minimizing the makespan on a single machine with flexible maintenances and jobs release dates. Comput. Oper. Res. 80, 11–22 (2017)

    Article  MathSciNet  Google Scholar 

  11. Sbihi, M., Varnier, C.: Single-machine scheduling with periodic and flexible periodic maintenance to minimize maximum tardiness. Comput. Ind. Eng. 55, 830–840 (2008)

    Article  Google Scholar 

  12. Chen, J.S.: Optimization models for the machine scheduling problem with a single flexible maintenance activity. Eng. Optim. 38, 53–71 (2006)

    Article  MathSciNet  Google Scholar 

  13. Yang, S.L., Ma, Y., Xu, D.L., Yang, J.B.: Minimizing total completion time on a single machine with a flexible maintenance activity. Comput. Oper. Res. 38, 755–770 (2011)

    Article  MathSciNet  Google Scholar 

  14. Chen, J.S.: Single machine scheduling with flexible and periodic maintenance. J. Oper. Res. Soc. 57, 703–710 (2006)

    Article  Google Scholar 

  15. Kanet, J.J.: Minimizing variation of flow time in single machine systems. Manag. Sci. 27, 1453–1459 (1981)

    Article  Google Scholar 

  16. Pang, J., Zhou, H., Tsai, Y.-C., Chou, F.-D.: A scatter simulated annealing algorithm for the bi-objective scheduling problem for the wet station of semiconductor manufacturing. Comput. Ind. Eng. 123, 54–66 (2018)

    Article  Google Scholar 

  17. Suppapitnarm, A., Seffen, K.A., Parks, G.T., Clarkson, P.J.: Simulated annealing: An alternative approach to true multi-objective optimization. Eng. Optim. 33, 59–85 (2000)

    Article  Google Scholar 

  18. Deb, K., Pratap, A., Sgarwal, S., Meyarivan, T.: A fast and elitist multiobjective genetic algorithm: NSGA-II. IEEE Trans. Evolut. Comput. 6, 182–197 (2002)

    Article  Google Scholar 

  19. Kennedy, J., Eberhart, R.C.: Particle swarm optimization. In: Proceedings of the 1995 IEEE International Conference on Neural Networks, pp. 1942–1948. IEEE press, New Jersey 1995

    Google Scholar 

Download references

Acknowledgment

The authors are grateful to the editor and the anonymous referees whose constructive comments have led to a substantial improvement in the presentation of the paper. This work was supported by the Natural Science Foundation of Zhejiang Province (Grant No. LY18G010012) and the National Natural Science Foundation of China (No.71671130).

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Authors and Affiliations

  1. Department of Hotel Management, Vanung University, Tao Yuan, Taiwan, Republic of China

    Ya-Chih Tsai

  2. The College of Mechanical and Electrical Engineering, Wenzhou University, Wenzhou, 325035, Zhejiang, China

    Jihong Pang & Fuh-Der Chou

Authors
  1. Ya-Chih Tsai
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  2. Jihong Pang
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  3. Fuh-Der Chou
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Corresponding author

Correspondence to Fuh-Der Chou .

Editor information

Editors and Affiliations

  1. South China Agricultural University, Guangzhou, China

    Kangshun Li

  2. Jiangxi University of Science and Technology, Ganzhou, China

    Wei Li

  3. South China Agricultural University, Guangzhou, China

    Hui Wang

  4. The University of Aizu, Aizu-Wakamatsu, Fukushima, Japan

    Yong Liu

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Tsai, YC., Pang, J., Chou, FD. (2020). Modeling and Scheduling for the Clean Operation of Semiconductor Manufacturing. In: Li, K., Li, W., Wang, H., Liu, Y. (eds) Artificial Intelligence Algorithms and Applications. ISICA 2019. Communications in Computer and Information Science, vol 1205. Springer, Singapore. https://doi.org/10.1007/978-981-15-5577-0_38

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  • DOI: https://doi.org/10.1007/978-981-15-5577-0_38

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-15-5576-3

  • Online ISBN: 978-981-15-5577-0

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