Abstract
This paper discussed the modeling approach of capacitive micromachined ultrasonic transducers (CMUTs) of hexagonal membrane structure. The active area of the hexagonal membrane is 1963.49 µm2. Area of hexagonal has been considered \({3\sqrt 3 }/2L^{2}\), where L is the length of every side. Analyses have been brought up by single-cell hexagonal geometries as well as array of the cells through finite element method (FEM) model and done with an industry standard tool, SolidWorks simulation. The comparative analysis of membrane displacement arrays of hexagonal geometries on a single substrate assembled with different distances between each other is also investigated and analyzed the results.
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Acknowledgements
The authors are highly indebted to University Grants Commission (UGC), Ministry of Human Resource and Development (MHRD), India, for technical help for this work.
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Maity, R., Maity, N.P., Guha, K., Srinivasa Rao, K., Girija Sravani, K., Baishya, S. (2020). Study of 3D Hexagonal Membrane Structure for MEMS-Based Ultrasonic Transducer Using Finite Element Method. In: Yang, LJ., Haq, A., Nagarajan, L. (eds) Proceedings of ICDMC 2019. Lecture Notes in Mechanical Engineering. Springer, Singapore. https://doi.org/10.1007/978-981-15-3631-1_19
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DOI: https://doi.org/10.1007/978-981-15-3631-1_19
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