Abstract
In this paper, we propose an angular ring metallization pattern for CMUT structure. The metallization is done in such a way that it is on the border of the membrane which forms an annular ring. It is observed that with decreasing area of the electrode, the collapse voltage increases and vice versa. The changes in collapse voltage with electrode area percentage, uncovered portion radius along with the change in gap height and different set of membrane thickness have been evaluated. Variation in collapse voltage with several membrane materials is also been observed. The proposed analytical model is compared with the finite element method (FEM)-based simulation by PZFlex, a commercially available software tool from Weidlinger Associates Inc. Excellent agreements between them are observed.
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Acknowledgements
The authors are highly indebted to the University Grants Commission (UGC), Ministry of Human Resource and Development (MHRD), India, for technical help for this work.
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Maity, R. et al. (2020). Analytical Modeling and FEM Simulation of the Collapse Voltage of an Angular Ring Metallization-Based MEMS Ultrasonic Transducer. In: Yang, LJ., Haq, A., Nagarajan, L. (eds) Proceedings of ICDMC 2019. Lecture Notes in Mechanical Engineering. Springer, Singapore. https://doi.org/10.1007/978-981-15-3631-1_18
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DOI: https://doi.org/10.1007/978-981-15-3631-1_18
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