Abstract
Generally, the laser heat-mode lithography materials are from inorganic chalcogenide phase-change thin films due to selective wet etching between crystalline and amorphous phases [1, 2]. Actually, some organic thin films can be also used as heat-mode lithography materials [3,4,5,6,7,8], and the lithography is completed through a single-step process, where the pattern structures are directly produced through laser-induced thermal gasification, thermal decomposition, or thermal deformation, and no developing process is required.
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Wei, J. (2019). Laser Heat-Mode Lithography Using Organic Thin Films. In: Laser Heat-Mode Lithography. Springer Series in Materials Science, vol 291. Springer, Singapore. https://doi.org/10.1007/978-981-15-0943-8_6
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DOI: https://doi.org/10.1007/978-981-15-0943-8_6
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