Abstract
The growth properties of ZnO Nanorods was studied on different seed layers by the deposition of Zinc oxide (ZnO) thin film on SiO2/Si substrate by RF sputtering at two different conditions, i.e., one at room temperature and another at 400 °C substrate temperature. Surface morphology of the seed layer was studied by X-Ray Diffraction and Atomic Force Microscopy (AFM). Low cost hydrothermal method was employed for the growth of ZnO Nanorods on both the seed layers. The structural properties of ZnO nanorods were characterized by Field Emission Scanning Electron Microscope (FESEM). The FESEM images showed the proper alignment and orientation of ZnO nanorods grown on both the seed layers. The I-V measurements were carried out at room temperature under dark light and Ultraviolet (UV) light source. In order to examine the UV detection, MSM (Metal–Semiconductor–Metal) photodetector was fabricated and responsivity was measured for the nanorods grown on both seed layers. The better responsivity and contrast ratio of ZnO nanorods based UV detector was observed in case of 150 nm seed layer deposited at 400 °C.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Radzimska AK, Jesionowski T (2014) Zinc oxide—from synthesis to application: a review. Materials 7:2833–2881
Chee CY, Nadarajah K, Siddiqui MK, Wong Y (2014) Optical and structural characterization of solution processed zinc oxide nanorods via hydrothermal method. Ceram Int 40:9997–10004
Sang L, Liao M, Sumiya M (2013) Sensors 13:10482–10518
Tian C, Jiang D, Zhao Y, Liu Q, Houa J, Zhao J, Liang Q, Gao S, Qin J (2014) Mater Sci Eng B 184:67–71
Frenzel H, Lorenz M, Lajn A, von Wenckstern H, Biehne G, Hochmuth H, Grundmann M (2009) ZnO-based metal-semiconductor field-effect transistors on glass substrates. Appl Phys Lett 95:153503
Yakuphanoglu F, Caglar Y, Caglar M, Lican S (2010) ZnO/p-Si heterojunction photodiode by sol–gel deposition of nanostructure n-ZnO film on p-Si substrate. Mater Sci Semicond Process 13:137–140
Shawn Lim S-H, Raorane D, Srinath S, Majumdar A (2006) Nanochemo-mechanical sensor array platform for high-throughput chemical analysis. Sens Actuators B 119:466–474
Ikizler B, Peker SM (2014) Effect of the seed layer thickness on the stability of ZnO nanorod arrays. Thin Solid Films 558:149–159
Sannakashappanavar BS, Pattanashetti NA, Byrareddy CR, Yadav AB (2018) Study of annealing effect on the growth of ZnO nanorods on ZnO seed layers. AIP Conf Proc 1943:020077
Ko YH, Nagaraju G, Yu JS (2015) Fabrication and optimization of vertically aligned ZnO nanorod array-based UV photodetectors via selective hydrothermal synthesis. Nanoscale Res Lett
Lee SH, Kim SH, Yu JS (2016) Metal-semiconductor-metal near-Ultraviolet (~380 nm) photodetectors by selective area growth of ZnO nanorods and SiO2 passivation. Nanoscale Res Lett
Lajvardi M, Ghazi ME, Izadifard M, Eshghi H, Hadi I (2018) Effect of seed layer thickness on optoelectronic properties of ZnO-NRs/p-Si photodiodes. Optik
Sannakashappanavar BS, Byrareddy CR, Kumar PS, Yadav AB (2018) Seed layer effect on different properties and UV detection capability of hydrothermally grown ZnO nanorods over SiO2/p-Si substrate. Superlattices Microstruct 117:503–514
Ali GM, Chakrabarti P (2010) ZnO-based interdigitated MSM and MISIM ultraviolet photodetectors. J Phys D Appl Phys 43:415103
Singh S, Park S-H (2015) Fabrication and characterization of Al:ZnO based MSM ultraviolet photodetectors. Superlattices Microstruct
Sannakashappanavar BS, Byrareddy CR, Pattanashetti NA, Singh K, Yadav AB (2019) Growth of ZnO nanorods on different seed layer thickness using the hydrothermal method for UV detection. J Nanoelectron Optoe 14:964–971
Acknowledgements
The authors would like to thank Indian Institute of Technology, Bombay for accepting the project proposal under the Indian Nanoectronics User Program (INUP). The author also likes to thank the faculties under INUP program for their proper guidance during the experimental work and overall support till the project completion.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2020 Springer Nature Singapore Pte Ltd.
About this paper
Cite this paper
Sannakashappanavar, B.S., Byrareddy, C.R., Varma, S., Pattanshetti, N.A., Yadav, A.B. (2020). Deposition of ZnO Thin Film at Different Substrate Temperature Using RF Sputtering for Growth of ZnO Nanorods Using Hydrothermal Method for UV Detection. In: Shreesha, C., Gudi, R. (eds) Control Instrumentation Systems. Lecture Notes in Electrical Engineering, vol 581. Springer, Singapore. https://doi.org/10.1007/978-981-13-9419-5_8
Download citation
DOI: https://doi.org/10.1007/978-981-13-9419-5_8
Published:
Publisher Name: Springer, Singapore
Print ISBN: 978-981-13-9418-8
Online ISBN: 978-981-13-9419-5
eBook Packages: EngineeringEngineering (R0)