ICCCE 2019 pp 387-404 | Cite as

Characterization and System Identification of XY Flexural Mechanism Using Double Parallelogram Manipulator for High Precision Scanning

  • Mahesh S. ShewaleEmail author
  • Ali Razban
  • Suhas P. Deshmukh
  • Sharad S. Mulik
  • Abhishek D. Patange
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 570)


This article represents modeling of double parallelogram flexural manipulator derived from basic classical mechanics theory. Fourth order vibration wave equation is used for mathematical modeling and its performance is determined for step input and sinusoidal forced input. Static characterization of DFM is carried out to determine stiffness and force deflection characteristics over the entire motion range and dynamic characteristics is carried out using Transient response and Frequency response. Transient response is determined using step input to DFM which gives system properties such as damping, rise time and settling time. These parameters are then compared with theoretical model presented previously. Frequency response of DFM system gives characteristics of system with different frequency inputs which is used for experimental modeling of DFM device. Here, Voice Coil Motor is used as Actuator and optical encoder is used for positioning sensing of motion stage. It is noted that theoretical model is having 5% accuracy with experimental results. To achieve better position and accuracy, PID and LQR (Linear Quadratic Regulator) implementation was carried out on experimental model. PID gains are optimally tuned by using Ziegler Nichols approach. PID control is implemented experimentally using dSPACE DS1104 microcontroller and Control Desk software. Experimentally, it is observed that positioning accuracy is less than 5 μm. Further multiple DFM blocks are arranged for developing XY flexural mechanism and static characterization was carried out on it. The comparison of experimental and FEA results for X-direction and Y-direction is presented at end of paper.


Flexures PID control System identification dSPACE Precision scanning DS1104 Voice coil actuator 


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Copyright information

© Springer Nature Singapore Pte Ltd. 2020

Authors and Affiliations

  • Mahesh S. Shewale
    • 1
    Email author
  • Ali Razban
    • 1
  • Suhas P. Deshmukh
    • 2
  • Sharad S. Mulik
    • 3
  • Abhishek D. Patange
    • 3
  1. 1.Department of Mechanical Engineering, Purdue School of Engineering and TechnologyIUPUIIndianapolisUSA
  2. 2.Department of Mechanical EngineeringGovernment College of Engineering, KaradSataraIndia
  3. 3.Department of Mechanical EngineeringRMD Sinhgad School of EngineeringPuneIndia

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