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Heterogeneous Integration of CIS, LED, MEMS, and VCSEL

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Heterogeneous Integrations

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Abstract

In this chapter, the heterogeneous integration of CIS (CMOS image sensor), heterogeneous integration of LED (light-emitting diode), heterogeneous integration of MEMS (microelectromechanical systems), and heterogeneous integration of VCSEL (vertical cavity surface emitted laser) and PD (photodiode) detector will be presented. Emphasis is placed on providing some examples of each of these heterogeneous integrations.

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Authors and Affiliations

  1. ASM Pacific Technology, Hong Kong, New Territories, Hong Kong

    John H. Lau

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  1. John H. Lau
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Correspondence to John H. Lau .

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Lau, J.H. (2019). Heterogeneous Integration of CIS, LED, MEMS, and VCSEL. In: Heterogeneous Integrations. Springer, Singapore. https://doi.org/10.1007/978-981-13-7224-7_10

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  • DOI: https://doi.org/10.1007/978-981-13-7224-7_10

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  • Online ISBN: 978-981-13-7224-7

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